High rep rate high performance plasma focus as a powerful radiation source

Abstract

Basic operational characteristics of the plasma focus are considered from design perspectives to develop powerful radiation sources. Using these ideas we have developed two compact plasma focus (CPF) devices operating in neon with high performance and high repetition rate capacity for use as an intense soft X-ray (SXR) source for microelectronics lithography. The NX1 is a four-module system with a peak current of 320 kA when the capacitor bank (7.8 F 2 4) is charged to 14 kV. It produces 100 J of SXR per shot (4% wall plug efficiency) giving at 3 Hz, 300 W of average SXR power into 4. The NX2 is also a four-module system. Each module uses a rail gap switching 12 capacitors each with a capacity of 0.6 F. The NX2 operates with peak currents of 400 kA at 11.5 kV into watercooled electrodes at repetition rates up to 16 Hz to produce 300 W SXR in burst durations of several minutes. SXR lithographs are taken from both machines to demonstrate that sufficient SXR flux is generated for an exposure with only 300 shots. In addition, flash electron lithographs are also obtained requiring only ten shots per exposure. Such high performance compact machines may be improved to yield over 1 kW of SXR, enabling sufficient exposure throughput to be of interest to the wafer industry. In deuterium the neutron yield could be over 10 10 neutrons per second over prolonged bursts of minutes.

EBT2 dosimetry of x-rays produced by the electron beam from a Plasma Focus for medical applications

“…[3][4][5][6][7][8][9]. A most comprehensive review of the state of the art can be found in Bernard et al 10 The approach followed in the present work is to use the electron beam generated backward by the Plasma Focus device to generate xrays upon conversion of the beam onto a metal target.…”

Computing plasma focus pinch current from total current measurement

“…6,7,10,11,[14][15][16] An improved five-phase code crucially incorporating small disturbance speed, 17 and radiation coupling with dynamics, assisted further projects, 8,[18][19][20][21][22][23] and was published in the internet in 2000 ͑Ref. The basic model was described in 1984 ͑Ref.…”

“…The basic model was described in 1984 ͑Ref. It has been used in machines including UNU/ICTP PFF, 10,11,15,16,21 NX2, [18][19][20] and NX1, 18 and has been adapted to the Filippovtype DENA. 6,7,10,11,[14][15][16] An improved five-phase code crucially incorporating small disturbance speed, 17 and radiation coupling with dynamics, assisted further projects, 8,[18][19][20][21][22][23] and was published in the internet in 2000 ͑Ref.…”

Plasma focus ion beam fluence and flux—For various gases

“…16) and used in the design and interpretation of experiments. [17][18][19] An improved 5-phase code 2 incorporating finite small disturbance speed, 20 radiation and radiation-coupled dynamics was used, [21][22][23] and was web-published 24 in 2000. Plasma self-absorption was included 24 in 2007.…”