2011
DOI: 10.1063/1.3575573
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High resolution cathodoluminescence hyperspectral imaging of surface features in InGaN/GaN multiple quantum well structures

Abstract: InGaN/GaN multiple quantum wells (MQWs) have been studied by using cathodoluminescence hyperspectral imaging with high spatial resolution. Variations in peak emission energies and intensities across trenchlike features and V-pits on the surface of the MQWs are investigated. The MQW emission from the region inside trenchlike features is redshifted by approximately 45 meV and more intense than the surrounding planar regions of the sample, whereas emission from the V-pits is blueshifted by about 20 meV and relati… Show more

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Cited by 77 publications
(63 citation statements)
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“…The beam scans across the sample surface, and a 1600 pixel emission spectrum from 300 to 800 nm is recorded for every pixel with a spatial resolution approaching 10 nm. 24 Electron beam energies of up to 10 kV have been used to probe light emission from up to 300 nm below the sample surface. This depth was calculated by Monte Carlo simulations using the CASINO 25 software to estimate the beam voltages required to excite the active regions of the samples.…”
Section: Methodsmentioning
confidence: 99%
“…The beam scans across the sample surface, and a 1600 pixel emission spectrum from 300 to 800 nm is recorded for every pixel with a spatial resolution approaching 10 nm. 24 Electron beam energies of up to 10 kV have been used to probe light emission from up to 300 nm below the sample surface. This depth was calculated by Monte Carlo simulations using the CASINO 25 software to estimate the beam voltages required to excite the active regions of the samples.…”
Section: Methodsmentioning
confidence: 99%
“…21 CL hyperspectral imaging was performed in a field emission gun scanning electron microscope (FEI Sirion 200) modified for CL spectroscopy. 18 An advantage of the hyperspectral imaging system used is its ability to measure shifts in emission wavelength on a length scale <20 nm, 22 thus enabling precise mapping of CL spectral features. The CL was excited with an electron beam with accelerating voltage of 2 kV, 10 kV, or 30 kV, with the sample held at room temperature.…”
Section: Sample Fabricationmentioning
confidence: 99%
“…In recent work~Liu et al, 2009;Bruckbauer et al, 2011;!, we presented CL hyperspectral imaging results in which variations over length scales approaching 20 nm were observed. In this article, we more fully describe the steps we have taken to overcome the high noise level inherent in nanoscale CL hyperspectral images, including aspects of both instrumentation and data treatment.…”
Section: Introductionmentioning
confidence: 99%