2021
DOI: 10.1063/5.0052125
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High-resolution diagnostics of GaAs wafer inhomogeneity using an optical switch within the terahertz band

Abstract: We study a technique for diagnostics of the loss tangent inhomogeneity in semi-insulating gallium arsenide within a frequency band of 0.3 THz and higher. The low-oversize-factor resonator of the recently developed optical switch formed by an intersection of a single-mode waveguide and a cutoff waveguide in the presence of a semiconductor is used to analyze small fragments of a movable test wafer. The obtained spatial resolution (0.1 mm2) is much higher than that of the known methods. The results of using the f… Show more

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Cited by 7 publications
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