2008
DOI: 10.1088/0957-4484/19/35/355308
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High-resolution electron-beam patternable nanocomposite containing metal nanoparticles for plasmonics

Abstract: Polymer nanocomposites containing noble metal nanoparticles are promising materials for plasmonic applications. In this paper, we report on a high-resolution negative-tone nanocomposite resist based on poly(vinyl alcohol) where silver nanoparticles and nanopatterns are simultaneously generated by electron-beam lithography. Our results indicate nanostructures with a relatively high concentration of nanoparticles and, consequently, an electromagnetic coupling among the nanoparticles. Therefore, the patternable n… Show more

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Cited by 86 publications
(80 citation statements)
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“…These nanocomposites find applications in several areas, including electronics, photonics, sensors, and medicine. [7][8][9][10][11][12][13] Thin films of the nanocomposites can be grown by plasma deposition methods. [7] Various soft chemical routes have also been developed for their fabrication; [12,[14][15][16][17] in situ growth of metal nanoparticles within a polymer film is especially efficient.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…These nanocomposites find applications in several areas, including electronics, photonics, sensors, and medicine. [7][8][9][10][11][12][13] Thin films of the nanocomposites can be grown by plasma deposition methods. [7] Various soft chemical routes have also been developed for their fabrication; [12,[14][15][16][17] in situ growth of metal nanoparticles within a polymer film is especially efficient.…”
Section: Introductionmentioning
confidence: 99%
“…[23] We have demonstrated efficient optical power limiting [18,23] and microwave absorption [24] in silver poly(vinyl alcohol) (Ag-PVA) films. These films have also been used to fabricate high-resolution negative-tone resists, [9] random lasers with coherent feedback, [10] polarizing filters, [25] and a prototype for a generic memory device. [11] The efficacy of a metal-nanoparticle-embedded thin-film catalyst is best demonstrated by using a well-studied nanoparticle-catalyzed reaction as a benchmark; we chose to investigate the reduction of 4-nitrophenol (4NP) by sodium borohydride.…”
Section: Introductionmentioning
confidence: 99%
“…[178][179][180][181][182] and [183][184][185][186] Recently, this method found a practical application in nanolithography [187] for optical and electronic data transfer. High molecular weight polymers like polyvinyl alcohol (PVA) or poly(acrylamide) (PAM) were employed to stabilize the nanoparticles.…”
Section: Electron Beam or γ-Irradiationmentioning
confidence: 99%
“…Despite these benefits, it has not been extensively used as a cell guiding material for patterned cell culture because the patterns of PVA are difficult to form by conventional photolithography without biologically-undesirable chemicals, such as photoacid generators and a developer [30][31][32]. Thus, the fabrication of PVA-patterned platforms for the formation of cell patterns by an eco-friendly and biocompatible ion beam-based technique without any toxic chemicals has not been previously studied.…”
Section: Introductionmentioning
confidence: 99%