The authors have demonstrated the crystal growth of CaF2∕CdF2∕CaF2 multilayered heterostructures on Si(100) substrates as double-barrier resonant tunneling diode structures by a low-temperature growth technique. Current-voltage characteristics were investigated and the authors observed negative differential resistance (NDR) characteristics at room temperature. The peak-to-valley current ratio was 2–8, and 13 at maximum, and peak current density was 80–90A∕cm2. The quantum-well layer thickness dependence of NDR peak voltages is also discussed on the basis of qualitative analytical model using the Esaki-Tsu formula.