2022
DOI: 10.1038/s41378-021-00338-y
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High-resolution fabrication of nanopatterns by multistep iterative miniaturization of hot-embossed prestressed polymer films and constrained shrinking

Abstract: The fabrication of nanostructures and nanopatterns is of crucial importance in microelectronics, nanofluidics, and the manufacture of biomedical devices and biosensors. However, the creation of nanopatterns by means of conventional nanofabrication techniques such as electron beam lithography is expensive and time-consuming. Here, we develop a multistep miniaturization approach using prestressed polymer films to generate nanopatterns from microscale patterns without the need of complex nanolithography methods. … Show more

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Cited by 10 publications
(7 citation statements)
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“…One limitation is that our topographical array shows a higher heterogeneity in terms of the roughness levels generated and is restricted to the microscale level due to the inherent capabilities of our methods. Thus, emerging methods such as thermal shrinking may produce more micro-scale reproducibility ( Sayed and Selvaganapathy, 2022 ).…”
Section: Discussionmentioning
confidence: 99%
“…One limitation is that our topographical array shows a higher heterogeneity in terms of the roughness levels generated and is restricted to the microscale level due to the inherent capabilities of our methods. Thus, emerging methods such as thermal shrinking may produce more micro-scale reproducibility ( Sayed and Selvaganapathy, 2022 ).…”
Section: Discussionmentioning
confidence: 99%
“…3. Various fabrication methods for PDMS have been reported in the last decade [33][34][35] , but few have realized patterning and release of suspended PDMS thin films. Considering the difficulty of simultaneous compatible fabrication of PDMS-suspended beams and silicon zigzag beams, the two subsystems patterning process is intentionally designed on the top and bottom sides, respectively.…”
Section: Fabricationmentioning
confidence: 99%
“…3. There have been various fabrication methods of PDMS reported in the decade [33][34][35] , but few realized patterning and releasing suspended PDMS thin lms. Especially considering the di culty of simultaneous compatible fabrication of PDMS suspended beams and silicon zigzag beams, the patterning process of the two subsystems is designed intentionally on the top and bottom sides respectively.…”
Section: Fabricationmentioning
confidence: 99%