High resolution flexible 3-RRR planar parallel micro-stage in near singular configuration for resolution improvement. Part I

Ronchi, S.; Krut, Sébastien; Pierrot-Deseilligny, Marc; Fournier, Alain

doi:10.1109/iros.2005.1545142

Cited by 3 publications

(7 citation statements)

References 12 publications

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“…We focus in this paper on the micro-stage that will achieve the high resolution and fast positioning. New micro-stage architecture has been presented by the authors in [2], based on the combination of different features: * Planar parallel mechanism. * Near singular configuration.…”

Section: Architecturementioning

confidence: 99%

“…The choices for such a combination of features have been detailed in [2]. We will focus in this paper on the flexible joints, and more precisely on the force modeling.…”

Section: Architecturementioning

confidence: 99%

“…We can cite two major books written by Howell [3] and Henein [4] that try to cover the complete range of flexible links, as well as (2). Development Department NBS Technologies SAS Avenue Villevieille, 13106 Rousset, France some modeling methods for multiple instances of flexibles links in assemblies and examples on realized prototypes.…”

Section: Architecturementioning

confidence: 99%

“…2 represents the same kinematic chain, once manufactured and assembled. Sub-mechanism and matrix decomposition While writing the inverse velocity kinematics solutions, we managed to write the following relation (see [2] …”

Section: Architecturementioning

confidence: 99%

“…To express the matrix M-, we will separate the microstage into two sub-mechanisms, as we did for the models of the inverse positions and velocities (see [2]). One is composed of the planar parallel 3-RRR mechanism represented in Fig.…”

Section: ) Expression Ofthe Matrix M-lmentioning

confidence: 99%

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High Resolution Flexible 3-RRR Planar Parallel Micro-Stage in Near Singular Configuration for Resolution Improvement

Ronchi

Krut

Pierrot

et al.

2005 IEEE International Conference on Industrial Technology

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We focus on the micro-stage of a new high resolution positioning machine. One of its key features is the use of flexible circular notch hinges for passive joints. After a reminder of the micro-stage architecture and its inverse position and velocity kinematics solutions, a force model is developed for the choice of the actuators. This model takes into account the flexible R (Revolute) joints modeled as torsional springs and the external forces applied on the traveling plate. Simulations are conducted to evaluate both kinds of forces and result in the choice of the appropriate actuator. The final design of the micro-stage is presented as well as the obtained prototype.

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Section: Architecturementioning

confidence: 99%

“…The choices for such a combination of features have been detailed in [2]. We will focus in this paper on the flexible joints, and more precisely on the force modeling.…”

Section: Architecturementioning

confidence: 99%

Section: Architecturementioning

confidence: 99%

Section: Architecturementioning

confidence: 99%

Section: ) Expression Ofthe Matrix M-lmentioning

confidence: 99%

See 3 more Smart Citations

High Resolution Flexible 3-RRR Planar Parallel Micro-Stage in Near Singular Configuration for Resolution Improvement

Ronchi

Krut

Pierrot

et al.

2005 IEEE International Conference on Industrial Technology

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Data-Driven Approach to Using Uniform Experimental Design to Optimize System Compensation Parameters for an Auto-Alignment Machine

2018

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Trajectory Following of a Micro Motion Stage Based on Closed-Loop FEM Simulation

Shahidi

Mahboobi

Pirouzpanah

et al. 2007

Volume 11: Micro and Nano Systems, Parts a and B

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Micro motion stages are one of the essential components in field of micro robotics and ultra fine positioning systems. This research presents the optimum design of a 3-DOF micro motion stage and its position control using FEM simulation. This stage to be studied uses a 3 RRR flexure hinge base compliant mechanism driven by three piezoelectric stack actuators to provide micro scale planar motion. First of all parametric modeling of the stage will be fulfilled in ANSYS environment utilizing a commercial piezostack and different types of flexure hinges. Hence the Jacobian matrix will be achieved for each case. The optimum selection of the hinge form will be achieved upon results of the previous phase. Finally embedded closed-loop FEM approach in ANSYS programming will be used to follow a specified trajectory. Hereby, flexibilities of mechanism and piezoelectric actuator behavior will be modeled with more reliability than any other analytical approach.

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High resolution flexible 3-RRR planar parallel micro-stage in near singular configuration for resolution improvement. Part I

Cited by 3 publications

References 12 publications

High Resolution Flexible 3-RRR Planar Parallel Micro-Stage in Near Singular Configuration for Resolution Improvement

High Resolution Flexible 3-RRR Planar Parallel Micro-Stage in Near Singular Configuration for Resolution Improvement

Data-Driven Approach to Using Uniform Experimental Design to Optimize System Compensation Parameters for an Auto-Alignment Machine

Trajectory Following of a Micro Motion Stage Based on Closed-Loop FEM Simulation

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