published over 300 technical papers and 11 book chapters and holds 31 US patents. His current research interests include MEMS/NEMS, inertial sensors, microactuators, optical MEMS, optical beam steering, LiDAR, microspectrometers, and optical microendoscopy. He is a fellow of IEEE and SPIE. Frederic Zamkotsian received the Ph.D. degree in Physics in 1993 from the University of Marseilles (France). Since then, he has worked in the field of optoelectronics and semiconductor physics for optical telecommunication in France and in Japan. In 1998, he joined the Laboratoire d'Astrophysique de Marseille (LAM, Aix-Marseille University, CNRS, CNES), where he is involved in MOEMS-based astronomical instrumentation for ground-based and space telescopes, including conception and characterization of new MOEMS devices, as well as development of new instruments (principal investigator of BATMAN instrument to be placed on 4 m class telescope in 2020 and on 8 m class telescope in 2023). He has published over 200 technical papers and international conference proceedings, as well as 3 book chapters. On MOEMS, his current research interests are in programmable slits for application in multiobject spectroscopy (JWST, European networks, EUCLID, BATMAN), deformable mirrors for adaptive optics, and programmable gratings for spectral tailoring. vii micromachines EditorialOptical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact with light through actuation or sensing at a micron or millimeter scale. Optical MEMS have had enormous commercial success in projectors, displays, and fiber optic communications. The best known example is Texas Instruments' digital micromirror devices (DMDs). The development of optical MEMS was impeded seriously by the Telecom Bubble in 2000. Fortunately, DMDs grew their market size even in that economy downturn. Meanwhile, in the last one and half decades, the optical MEMS market has been slowly but steadily recovering. During this time span, the major technological change was the shift of thin-film polysilicon microstructures to single-crystal-silicon microstructures. Especially in the last few years, cloud data centers demand large-port optical cross connects (OXCs), autonomous driving looks for miniature light detection and ranging systems (LiDAR), and virtual reality/augmented reality (VR/AR) demands tiny optical scanners. This is a new wave of opportunities for optical MEMS. Furthermore, several research institutes around the world have been developing MOEMS devices for extreme applications (very fine tailoring of light beam in terms of phase, intensity, or wavelength) and/or extreme environments (high vacuum or cryogenic temperature) for many years.This special issue contains twelve research papers covering MEMS mirrors [1-10], MEMS variable optical attenuators (VOAs) [11], and tunable spectral filters [12]. These MEMS devices are based on three of the commonly used actuation mechanisms: electrothermal [1], ele...