High-resolution multidimensional displacement monitoring system

Lee, Neville Ka-shek; Ym, Cai; Joneja, Ajay

doi:10.1117/1.601521

Cited by 26 publications

(11 citation statements)

References 7 publications

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“…1 The same year, Lee et al used optics and a quadrant photo diode (QPD) to develop a five-DOF measurement system. 2 Linear resolution could be down to 50 nm, with an angular resolution 0.25 μrad. In 1998, Fan et al developed a six-DOF stage error compensation system.…”

Section: Introductionmentioning

confidence: 99%

Determination of the position and orientation of a flat piezoelectric micro-stage by moving the optical axis

Zhuang

Lee

Liu

2014

Review of Scientific Instruments

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A moving optical axis measurement system with six degrees-of-freedom (DOF) is proposed in this study. The system is very simple and can be placed inside a flat piezoelectric micro-stage. The system comprises three two-DOF optical measurement modules, each having a quadrant photo diode (QPD), a lens, and a laser diode. These three modules and the geometric configuration of their installation allow displacement measurements with up to six-DOF to be made. A mathematical model of this system is also presented. By analyzing the sensitivity and relationship between the displacement of the stage and each of the QPD light spots, movement can be observed. Signal feedback enables multi-axis nano-scale positioning control. We also present a new six-DOF nano stage, which uses piezoelectric actuators for displacement. This stage was used to verify the proposed six-DOF measurement system. Linear and angular resolution of the system can be down to 10 nm and 0.1 arcsec. Linear and angular displacement measurement errors of this six-DOF measurement system are in the range of ±70 nm and ±0.65 arcsec.

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Section: Introductionmentioning

confidence: 99%

Determination of the position and orientation of a flat piezoelectric micro-stage by moving the optical axis

Zhuang

Lee

Liu

2014

Review of Scientific Instruments

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“…From the output signals of the PSDs, we can calculate the 3-D position and orientation of the three-facet mirror, thus enabling us to obtain the 3-D position and orientation of the objects. This method utilizes a small and light mirror, thus the mirror affects the dynamic characteristics of the object much less than that of Lee et al's method [4]. …”

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confidence: 98%

Measurement of three-dimensional rotational and translational displacements using a multifaceted mirror

Park

Cho

2003

SPIE Proceedings

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A measurement system that can measure the six-degree-of-freedom motions of arbitrary objects is proposed. The measurement system utilizes a special mirror looking like a triangular pyramid and having three reflective lateral surfaces, which is to be mounted on the objects of interest. Once a laser beam illuminates the top of the mirror, the mirror reflects and splits the beam into three beams. These reflected beams are detected by three position-sensitive detectors (PSD), respectively. Based on the signal outputs of the PSDs, the three-dimensional position and orientation of the mirror can be computed, which, in turn, determines the three dimensional position and orientation of the object. This paper proposes two options in applying the measurement principle, one of which has its laser beam source fixed in space, and the other controls the translational motion of the laser beam source to track the mirror. In this paper, the principle of the measurement is proved to be valid through theoretical analysis and experiments. And the advantages and disadvantages of both options are discussed.

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“…For the second method, it is difficult to fabricate a miniaturized reflective target 2 precisely and to measure the motion of a small object because it needs sufficient space for multiple reflective targets 3 or optical devices. 4 A new six-DOF measurement system using a diffraction grating target was proposed to overcome these problems. 5 Since this system uses several diffracted beams generated from a diffraction grating, it requires only one laser source and one cooperative target, which can simplify the structure of the measurement system.…”

Section: Introductionmentioning

confidence: 99%

“…One is using multiple interferometers for each axis 1 and the other is detecting the movement of beams reflected from cooperative targets. [2][3][4] Although the first method can obtain high resolution and decoupled information for each axis, it increases the size and complexity of a system and requires a high-quality reference mirror. Hence it is usually applied to control and calibration of precision stages.…”

Section: Introductionmentioning

confidence: 99%

Application of sensitivity analysis for the design of six-degree-of-freedom measurement system

et al. 2001

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Abstract. We present a sensitivity analysis and performance evaluation of a six-degree-of-freedom measurement system that uses a diffraction grating as a cooperative target. To design the measurement system, we require a theoretical analysis of performance, such as sensitivity of each sensing direction. The intensity distributions of the diffracted beams are calculated with the scalar diffraction theory and sensitivity of the measurement system is analyzed against the variations of design parameter values. Using the results of sensitivity analysis, we design the measurement system and evaluate its performance with resolution, measurement error, and crosstalk. The resolution is less than 0.2 m in translation and 0.5 arcsec in rotation. In experiments, measurement error and crosstalk between sensing channels are within Ϯ0.5 m in translation and Ϯ2 arcsec in rotation.

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High-resolution multidimensional displacement monitoring system

Cited by 26 publications

References 7 publications

Determination of the position and orientation of a flat piezoelectric micro-stage by moving the optical axis

Determination of the position and orientation of a flat piezoelectric micro-stage by moving the optical axis

Measurement of three-dimensional rotational and translational displacements using a multifaceted mirror

Application of sensitivity analysis for the design of six-degree-of-freedom measurement system

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