We here report on the design of a planar microslot waveguide NMR probe with an induction element that can be fabricated at scales from centimeters to nanometers to allow analysis of biomolecules at nano-or picomole quantities, reducing the required amount of materials by several orders of magnitude. This device demonstrates the highest signal-to-noise ratio for a planar detector to date, measured by using the anomeric proton signal from a 15.6-nmol sample of sucrose. This probe had a linewidth of 1.1 Hz for pure water without susceptibility matching. Analysis of 1.57 nmol of ribonuclease-A shows high sensitivity in one-and twodimensional NMR spectra. Along with reducing required sample volumes, this integrated geometry can be packed in parallel arrays and combined with microfluidic systems. Further development of this device may have broad implications not only for advancing our understanding of many intractable protein structures and their folding, molecular interactions, and dynamic behaviors, but also for high-sensitivity diagnosis of a number of protein conformational diseases.inductive microslot ͉ miniature probe fabrication ͉ nanomole RNAase-A structural detection ͉ nuclear magnetic resonance scaling ͉ ultra-sensitivity N uclear magnetic resonance (NMR) is a powerful analytical tool not only for determining complex biomolecular structures (1-4) but also for monitoring molecular dynamics (5-7). Despite its versatility, NMR protein and large-molecule structural analyses currently require large quantities of protein material at high concentration and purity (8-10), and timeconsuming data gathering (11-13). Furthermore, it has been difficult to obtain adequate amounts of proteins with high molecular weight, many protein complexes, and especially membrane proteins for structural analysis because they can form insoluble aggregates (14). We here report design and fabrication of a microdevice that can analyze nanomole quantities of proteins (15)(16)(17)(18)(19), and that can be integrated in microfabricated systems.The ultimate sensitivity limit is a single spin. Single-electron spins have been detected by using mechanical oscillations (20) and by single nuclear spins using optical methods (21,22). For a volume on the order of Ϸ10 8 spins, a report of a novel semiconductor detection mechanism shows electronic detection of small quantities of spin 3/2 nuclei at the nanoscale (23). However, all of these techniques require low temperatures. For liquid samples at room temperature, pioneering work on fabrication of solenoids around capillary tubes (16, 24) and microfabrication techniques to create planar coils on semiconductor substrates (1, 25) demonstrates that miniaturization of probes is possible and substantially reduces sample quantity while retaining signal sensitivity (15). Solenoidal microcoils detect nanomole quantities with high sensitivity but have not been successfully fabricated below Ϸ300 m inner diameter (26), whereas planar coils on semiconductor substrates are scalable but show lower signal sensitivit...