High-resolution two-dimensional solid-state beam scanner module based on vertical-cavity-surface-emitting laser array

Abstract

We realized electrical 2D beam scanning with field of view of 64°×14° and resolution points number of >9,000 (450×20) by fabricating linear array of beam scanners integrated with an electro-thermally tunable surface-grating vertical cavity surface emitting laser and assisting with a cylindrical lens. It is expected to cover the field of view of 108°×40° with resolution points number of >49,000 (780×64) by enlarging the full diffraction angle of diffractive optical element and integrating more scanners in the array. The total module size could be managed in 1cm scale thanks to the omission of external light source and simply stacked optics.