“…It is capable of extracting information about the chemical composition and crystal structure parameters of the sample, its layers and lateral structure, crystal lattice mismatch, relaxation, defects, crystal size, texture etc. (Bowen & Tanner, 2018, 1998Holy ´et al, 2017;Hayashi et al, 2000;Bocchi et al, 1996;Zaumseil et al, 2011;Kaganer et al, 1997). The achievable resolution and, in general, the possibility of reconstructing the parameters of interest depend strongly on the correct choice of measurement configuration (Bowen & Tanner, 1998;Pietsch et al, 2004), namely an appropriate reflection and measurement geometry, as well as a suitable scan or reciprocal-space map (RSM), or a combination of several scans or RSMs.…”