2019
DOI: 10.1186/s11671-019-2983-1
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High-Sensitivity and Long-Life Microchannel Plate Processed by Atomic Layer Deposition

Abstract: As a key component of electron multiplier device, a microchannel plate (MCP) can be applied in many scientific fields. Pure aluminum oxide (Al 2 O 3 ) as secondary electron emission (SEE) layer were deposited in the pores of MCP via atomic layer deposition (ALD) to overcome problems such as high dark current and low lifetime which often occur on traditional MCP. In this paper, we systematically investigate the morphology, element distribution, and structure of samp… Show more

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Cited by 11 publications
(11 citation statements)
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“…5 a, we design the AZO conductive layer of AZO-MCP by using the WYM operation and temperature adjustment based on the working resistance. We use atomic layer deposition technology to grow the emission layer on microchannel wall of the two-dimensional pore arrays [ 3 , 11 , 22 ]. In Fig.…”
Section: Resultsmentioning
confidence: 99%
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“…5 a, we design the AZO conductive layer of AZO-MCP by using the WYM operation and temperature adjustment based on the working resistance. We use atomic layer deposition technology to grow the emission layer on microchannel wall of the two-dimensional pore arrays [ 3 , 11 , 22 ]. In Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The material is deposited on the substrate in the form of a monoatomic film surface. ALD can produce a continuous film without pinholes, with excellent coverage, and can control the thickness and composition of the atomic film [ 1 , 2 , 4 , 11 , 13 , 19 , 20 ].…”
Section: Experimental and Methodsmentioning
confidence: 99%
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“…In the measurements of Allgood et al, the measurements of C 16 and C 18 n -alkanes, 1-phenyl decane and two large ethoxylated alcohols appear to have similar deviations. The measurements of PAH compounds (except biphenyl and anthracene) and phenyl cyclohexane might be affected by the gain factors , as their EICS are measured preparing or purchasing calibration mixture of multiple compounds. However, no other references are obtained to cross-check these measurements.…”
Section: Resultsmentioning
confidence: 99%
“…On the basis, this paper proposed that setting a micro arrayholes waveguide gate between both MCPs to collect coupling loss for self-trigger or other complex detecting [30]- [32]. As shown in Fig.…”
Section: Figure 2 Electron Beam Diffusion In Coupling Processmentioning
confidence: 99%