High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm

Xu, Feng; Ren, Dongxu; Shi, Xiaolong; Li, Can; Lu, Weiwei; Lu, Lu; Lü, Liang; Yu, Benli

doi:10.1364/ol.37.000133

Cited by 222 publications

(108 citation statements)

References 8 publications

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“…Although plenty of research has already been done on electrical pressure sensors, it is also possible to develop these sensors in the optical domain where the key advantages are immunity to electromagnetic interference and the ability to deploy them in spark-sensitive environments. Several approaches have already been demonstrated (Fabry-Perot based [1], fiber Bragg grating based [2] or integrated sensors [3]) in a variety of material platforms. In this paper, we present a significant improvement over previously reported results by other groups [4] and ourselves [5] for an integrated pressure sensor in silicon-oninsulator.…”

Section: Introductionmentioning

confidence: 99%

Integrated differential pressure sensor in silicon-on-insulator

Hallynck

Bienstman

2012

IEEE Photonics Conference 2012

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Section: Introductionmentioning

confidence: 99%

Integrated differential pressure sensor in silicon-on-insulator

Hallynck

Bienstman

2012

IEEE Photonics Conference 2012

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“…In the literature, a number of interesting materials have been suggested for sensing pressure ranges from kPa to GPa. These include membranes of polymer, silver (Xu et al 2012), graphene , and others. The various properties of these materials, particularly CTE and melting temperature, will have to be carefully considered.…”

Section: Promising Research and Developmentmentioning

confidence: 99%

Technical Readiness and Gaps Analysis of Commercial Optical Materials and Measurement Systems for Advanced Small Modular Reactors

Anheier¹,

Suter²,

Qiao³

et al. 2013

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Energy Research and Development Roadmap and industry stakeholders by evaluating optically based instrumentation and control (I&C) concepts for advanced small modular reactor (AdvSMR) applications. These advanced designs will require innovative thinking in terms of engineering approaches, materials integration, and I&C concepts to realize their eventual viability and deployment. The primary goals of this report include:1. Establish preliminary I&C needs, performance requirements, and possible gaps for AdvSMR designs based on best-available published design data.2. Document commercial off-the-shelf (COTS) optical sensors, components, and materials in terms of their technical readiness to support essential AdvSMR in-vessel I&C systems.3. Identify technology gaps by comparing the in-vessel monitoring requirements and environmental constraints to COTS optical sensor and materials performance specifications.4. Outline a future research, development, and demonstration (RD&D) program plan that addresses these gaps and develops optical-based I&C systems that enhance the viability of future AdvSMR designs.The DOE-NE roadmap outlines RD&D activities intended to overcome technical barriers that currently limit advances in nuclear energy. As part of this strategy, DOE-NE is sponsoring research on advanced reactor supportive technologies to reduce the identified barriers. Key challenges that must be overcome include the high capital costs to develop nuclear power plants, maintaining safety performance as the reactor fleet expands, minimizing nuclear waste, and maintaining strong proliferation resistance. AdvSMR designs are a major component of this strategy, because these designs offer a number of unique advantages. The modular and small size of AdvSMR designs naturally lead to reduced capital investments and, potentially, construction savings through factory fabrication. However, new economic and technical challenges accompany the many attractive features offered by AdvSMR designs. Specifically, the modest power output of AdvSMRs does not provide the economy of scale afforded by large reactors. In addition, many of the AdvSMR designs operate at much higher temperatures than lightwater reactors and require instrumentation to withstand harsh, in-vessel environments arising from unconventional, chemically aggressive coolants and unique reactor system configurations.Addressing these I&C challenges will be critically important to the AdvSMR development program to ensure the viability and future success of advanced reactor designs. Solutions will likely be found through evolution of conventional reactor technology, and the development of entirely new concepts. Early pressure/boiling water reactors used conventional I&C technologies (e.g., thermocouples, ionchambers, strain-gauge pressure sensors) to satisfy design requirements. Because these technologies worked well in the relatively low-temperature reactor designs, the demand for alternate I&C technologies was limited. At the time, optical-based reactor monitoring concepts were g...

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“…The PM fiber end facet was polished with an angle of 8°to reduce the Fresnel reflection from the fiber end surface. The fabrication process of the sensing head is similar to that reported in our previous paper [5]. The distance between the fiber end and the diaphragm is approximately 150 μm adjusted by a high precision linear stage (Newport ILS-250CC) with a displacement resolution of 0.5 μm.…”

mentioning

confidence: 96%

“…These advantages include immunity to electromagnetic interference, the capability of performing remote sensing, very high resolution, fast response, and compact size [1]. In general, such a pressure sensor based on a micro Fabry-Perot (FP) cavity commonly uses an elastic diaphragm attached at the tip of an optical fiber, and the diaphragm as one of the mirrors of the FP cavity can be made of various materials, such as silica [2], polymer [3], silver, and graphene [4,5]. The FP pressure sensors based on different diaphragms have been investigated intensively in recent years, and the sensitivity has been improved steadily.…”

mentioning

confidence: 99%

“…It is rather straightforward to obtain the silver film thickness down to nanometers compared with other fabrication processes based on polymer and silica materials. The details of the electroless plating fabrication process can be found in our prior publication [5]. The typical thickness of the prepared silver diaphragm is 150 nm with excellent uniformity, and the reflectivity of the silver diaphragm is higher than 90% over the wavelength range from 1.5 to 1.6 μm.…”

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confidence: 99%

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Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

et al. 2014

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A fiber-optic acoustic pressure sensor based on a large-area nanolayer silver diaphragm is demonstrated with a high dynamic pressure sensitivity of 160 nm∕Pa at 4 kHz frequency. The sensor exhibits a noise limited detectable pressure level of 14.5 μPa∕Hz 1∕2 . Its high dynamic pressure sensitivity and simple fabrication process make it an attractive tool for acoustic sensing and photo-acoustic spectroscopy. . Although the pressure sensitivity of the sensor based on the graphene diaphragm can potentially be very high thanks to small thickness, it is usually difficult to prepare and process single-or few-layered graphene diaphragms with large diameters and transfer them onto the sensor head. In addition, optical reflectivity of the graphene layer is relatively small compared to metal films. In this Letter, we demonstrate an acoustic sensor based on a large area silver diaphragm 150 nm in thickness and 2.4 mm in diameter. While the thickness is comparable to the graphite-based diaphragms previously reported [6], the diameter is an order of magnitude larger. The acoustic pressure test shows that such a sensor based on a large area silver diaphragm has a sensitivity of up to 160 nm∕Pa at 4 kHz frequency. To our best knowledge, this is the highest acoustic pressure sensitivity ever reported for fiber-optic acoustic sensors based on diaphragms. The sensor is able to detect acoustic pressure as weak as 14.5 μPa∕Hz 1∕2 . The acoustic pressure sensing head based on the silver diaphragm comprises a standard polarization maintaining fiber (PM fiber), a ceramic split sleeve, and the silver diaphragm, as shown in Fig. 1(a). Figure 1(b) is the image of the proposed sensing head. A picture of the ceramic split sleeve, on which the diaphragm is attached, is also shown in the bottom inset of Fig. 1(b), and the inner diameter of this split sleeve is 2.4 mm. The PM fiber end facet was polished with an angle of 8°to reduce the Fresnel reflection from the fiber end surface. The fabrication process of the sensing head is similar to that reported in our previous paper [5]. The distance between the fiber end and the diaphragm is approximately 150 μm adjusted by a high precision linear stage (Newport ILS-250CC) with a displacement resolution of 0.5 μm.The silver thin film used in this sensor is approximately 150 nm thick with >2.4 mm diameter that covers one end of the split sleeve. The top inset of Fig. 1(b) is an SEM image of the silver diaphragm. This sensing diaphragm has several advantages, including good stability and high reflectivity over the near infrared wavelength range. In general, the pressure sensitivity depends both on the material and the thickness of the diaphragm. In fact, the pressure sensitivity of an acoustic sensor based on an edge-clamped circular diaphragm is proportional to R 4 ∕t 3 , where R is the radius and t is the thickness of the diaphragm [7]. Therefore a diaphragm with large

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High-sensitivity Fabry–Perot interferometric pressure sensor based on a nanothick silver diaphragm

Cited by 222 publications

References 8 publications

Integrated differential pressure sensor in silicon-on-insulator

Integrated differential pressure sensor in silicon-on-insulator

Technical Readiness and Gaps Analysis of Commercial Optical Materials and Measurement Systems for Advanced Small Modular Reactors

Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm

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