High sensitivity metamaterial based bi-material terahertz sensor

Alves, Fabio; Grbovic, Dragoslav; Kearney, Brian; Karunasiri, Gamani

doi:10.1117/12.2005272

Cited by 7 publications

(11 citation statements)

References 25 publications

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“…So the process is complicated, time consumed and expensive. Considering this problem, the researchers have developed different kinds of metamaterialbased sensors worked at optics [11,12,19], THz [20][21][22][23][24][25][26] and microwave [27][28][29][30][31][32], achieved groundbreaking realization methods and performances. Specifically, the refractive index of the medium around the meta-atom will be changed with the lesion level and chemical composition/concentration changings [33].…”

Section: Research Progress Overall Sensing Applications Analysis Of Metamaterialsmentioning

confidence: 99%

“…In addition, Alves et al constructed a MEMS temperaturesensing micro-mechanical arm on a semiconductor body and explored the temperature sensing technique in the terahertz band [29]. The sensor's absorbing element is designed with a resonant frequency that matches the source of the quantum cascade laser illumination.…”

Section: Temperature Sensing Based On the Thermal Expansion Coefficient Differencementioning

confidence: 99%

“…As shown in Figure 1C-i, the absorbing element is connected to two Al/SiOx microcantilevers (legs), anchored to a silicon substrate, which acts as a heat sink, allowed the sensor to return to its undisturbed position when the excitation was stopped. Figure 1C-ii shows the experimental results for the temperature sensing properties, which indicates a sensitivity of 0.2 deg/ • C. [38,50], (B) nanoscale reconfigurable photonic metamaterials and the corresponding temperature changing performances [51], (C) Metamaterial absorber configuration fabricated on a microcantilevers and the accordingly temperature changing inspired structure deformation performance [29].…”

Section: Temperature Sensing Based On the Thermal Expansion Coefficient Differencementioning

confidence: 99%

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Advanced Electromagnetic Metamaterials for Temperature Sensing Applications

Chen

Zheng

et al. 2021

Front. Phys.

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Metamaterials with novel properties have excited much research attention in the past several decades. Many applications have been proposed and developed for the reported metamaterials in various engineering areas. Specifically, for the resonant-type metamaterials with narrow resonance line width and strong resonance strength, the resonant frequency and strength are highly depended on the changings of meta-atom structure and/or substrate media properties induced by the environment physical or chemistry parameters varying. Therefore, physical or chemistry sensing applications for the resonant-type metamaterial units or arrays are developed in recent years. In this mini review, to help the researchers in those fields to catch up with the newly research advances, we would like to summarize the recently reported high-performance metamaterial-inspired sensing applications, especially the temperature sensing applications, based on different kinds of metamaterials. Importantly, by analyzing the advantages and disadvantages of several conventional metamaterial units, the newly proposed high quality-factor metamaterial units are discussed for high-precision sensing applications, in terms of the sensitivity and resolution. This mini review can guide researchers in the area of metamaterial-inspired sensors to find some new design routes for high-precision sensing.

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Section: Research Progress Overall Sensing Applications Analysis Of Metamaterialsmentioning

confidence: 99%

Section: Temperature Sensing Based On the Thermal Expansion Coefficient Differencementioning

confidence: 99%

Section: Temperature Sensing Based On the Thermal Expansion Coefficient Differencementioning

confidence: 99%

See 1 more Smart Citation

Advanced Electromagnetic Metamaterials for Temperature Sensing Applications

Chen

Zheng

et al. 2021

Front. Phys.

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“…Sensing structure is thermally insulated from the host substrate (heat sink) by supporting structures of lower thermal conductance. Figure 1(a) and (b) show schematic diagrams of one design of bimaterial sensor fabricated by our research group [9,10]. The bi-material legs undergo deformation [13] due to the temperature increase upon absorption of incident radiation by the absorber.…”

Section: Introductionmentioning

confidence: 99%

“…Another THz imaging approach is the use of microelectromechanical systems (MEMS) based bi-material detectors [8][9][10][11][12] fabricated with THz sensitive materials. A typical bi-material detector [12] consists of a sensing structure responsible for converting incoming radiation to heat.…”

Section: Introductionmentioning

confidence: 99%

Metal-organic hybrid metamaterial THz imaging band translators

et al. 2015

Self Cite

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We investigate the feasibility of negative photoresist as a structural material in metal-organic hybrid THz imaging detectors using SU-8. We will discuss design of metamaterials for MEMS-based terahertz (THz) thermal sensors and design and microfabrication process for building SU8-based MEMS THz focal plane arrays. Metamaterials of this kind, exhibiting absorption properties comparable to those of resonant metamaterials made using traditional thin films, coupled with the applicability of SU-8 as a structural material, offer possibilities for quick, simple microfabrication of focal plane arrays of THz imaging detectors. SU-8 is a low-cost material that can quickly be spun onto a substrate at a wide range of thicknesses and photolithographically patterned into a variety of structures. This removes the need for both PECVD deposition and plasma etching, dramatically increasing the speed and lowering the cost of production of such FPAs. We further investigate feasibility of use of such detectors as band translators rather than traditional bimaterial devices. Translators would be optically probed with an infrared (IR) camera. Individual pixels would absorb THz radiation, heat up and the thermal image would be projected onto an infrared camera, effectively translating the image from THz into IR.

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Design and Simulation of Strain Sensitive Metamaterial

Fang

Deng

2021

2021 IEEE International Workshop on Electromagnetics: Applications and Student Innovation Competition (iWEM)

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High sensitivity metamaterial based bi-material terahertz sensor

Cited by 7 publications

References 25 publications

Advanced Electromagnetic Metamaterials for Temperature Sensing Applications

Advanced Electromagnetic Metamaterials for Temperature Sensing Applications

Metal-organic hybrid metamaterial THz imaging band translators

Design and Simulation of Strain Sensitive Metamaterial

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