High Sensitivity, Miniature, Full 2-D Anemometer Based on MEMS Hot-Film Sensors

Liu, Hao-Bing; Lin, Nay; Pan, Shanshan; Miao, Jianmin; Norford, Leslie K.

doi:10.1109/jsen.2012.2236014

Cited by 53 publications

(32 citation statements)

References 23 publications

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“…The voltage outputs of the three hot-wire resistors on a circular plate at different airflow velocities are presented in Figure 8. The data are then processed with the algorithm developed in [4] for direction distinction. The direction measurement error is found to be less than ±8° at 10 m/s, as manifested in Figure 9.…”

Section: Resultsmentioning

confidence: 99%

“…For sensors based on the thermal principle, the measurement relies on the detection of the convective heat transfer from an electrically heated resistive sensing element to flowing fluid [3]. Without introducing any movable structure, thermal principle is more commonly used in flow sensors due to its fast response, and robust and simple structure [4].…”

Section: Introductionmentioning

confidence: 99%

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Out-of-plane micro triple-hot-wire anemometer based on Pyrex bubble for airflow sensing

Liu

Pan

Xue

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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The paper reports novel design and fabrication of out-of-plane micro airflow sensors based on the hot-wire sensing principle, i.e. gas cooling of electrically-heated wires. Three micro Ti/Au/Cu hot-wire resistors have been fabricated on an out-of-plane Pyrex bubble with height of 300 µm. They are arranged 120 degrees apart on the sidewall of a bubble at height of 100 µm for airflow velocity and direction detection. Air velocity around the out-of-plane bubble structure has been investigated for square and circular package designs. The sensor with axisymmetric circular package has demonstrated the ability to detect velocity (<10 m/s) and to determine flow direction with an error less than ±8° when the velocity is 10m/s. The sensitivity could be further improved in a new design with increased bubble height (1 mm) and elevated hot-wire resistor position (500 µm), according to the modeling results.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Out-of-plane micro triple-hot-wire anemometer based on Pyrex bubble for airflow sensing

Liu

Pan

Xue

et al. 2014

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

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“…In order to improve the detection sensitivity of the micro anemometer, here we designed the whole device by fully-integrated fabrication on a glass tube instead of previous manually-assembled method [3]. Fig.…”

Section: Anemometer Designmentioning

confidence: 99%

“…We have focused on development of an airflow sensor based on an out-of-plane structure. The work [3] has obtained high sensitivity for airflow speed and direction detection by using three manually-assembled MEMS hot-film resistors arranged 120 degrees apart on a cylindrical substrate. To improve the assembly effectiveness, we have also proposed three self-assembled micro hot-film resistors on a borosilicate glass bubble [4].…”

Section: Introductionmentioning

confidence: 99%

Micro anemometer by a MEMS compatible lab-on-a-tube technology

Yang

Liu

Xue

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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This paper reports a novel micro airflow anemometer based on the hot-film sensing principle, i.e. gas cooling of electrically heated resistance. The sensor with three Ti/Pt hot-film sensing components with width of 50µm and thickness of 130nm has been fabricated on a glass tube in a UV lithography system with multi-layer alignment by our developed MEMS compatible lab-on-a-tube technology. The micro anemometer has demonstrated high sensitivity, fast response and ability to detect wind speed and direction. The influence of environment temperature on output voltage when micro anemometer with and without the temperature compensation was evaluated. And the test response time is in the range of milliseconds, also faster than several seconds reported for that in-plane one [1]. In the wind speed and direction field-test, using a commercial ultrasonic anemometer as the reference, achieved mean error of direction is 13.5° and mean error of velocity is 0.02m/s.

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“…With increasing needs for low velocity fluid flow measurement systems, micro electro-mechanical sensors, primarily in the form of hot-wire anemometers, have been developed with various architectures and measuring ranges [1][2][3]. Mechanical flow sensing methods are also being researched for sensing and measurement where the drag force exerted by the flowing fluid changes the stress of the cantilever structure inducing changes in the electrical characteristics calibrated for reading out fluid flow velocity [4,5].…”

Section: Introduction Backgroundmentioning

confidence: 99%

Low velocity digital air flow sensor from 3D printed PEDOT:PSS micro-hair structures

Devaraj

Travaš-Sejdić

et al. 2015

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

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This paper reports a novel method for digital sensing of low-velocity air flow using high aspect-ratio 3D printed conducting polymer (PEDOT:PSS) micro-hair structures (1000 μm long, 5.5±0.5 μm diameter). By implementing multiple micro-hair structures as micro-switches that respond to air flows of particular velocities, a low-velocity digital flow sensor capable of detecting air flow in the range of 61 mm/s to 99 mm/s is demonstrated.

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High Sensitivity, Miniature, Full 2-D Anemometer Based on MEMS Hot-Film Sensors

Cited by 53 publications

References 23 publications

Out-of-plane micro triple-hot-wire anemometer based on Pyrex bubble for airflow sensing

Out-of-plane micro triple-hot-wire anemometer based on Pyrex bubble for airflow sensing

Micro anemometer by a MEMS compatible lab-on-a-tube technology

Low velocity digital air flow sensor from 3D printed PEDOT:PSS micro-hair structures

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