High sensitivity optical waveguide accelerometer based on Fano resonance

Wan, Fenghua; Qian, Guang; Li, Ruo‐Zhou; Tang, Jie; Zhang, Tong

doi:10.1364/ao.55.006644

Cited by 25 publications

(15 citation statements)

References 34 publications

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“…Referring to the application of polymers in accelerometers, in [ 20 ], an SU-8-polymer-based, single-mass, three-axis, piezoresistive accelerometer was built ( Figure 2 a); it demonstrated better sensitivity due to the low Young’s modulus of SU-8 compared with Si, and piezoresistive materials such as ZnO nanorods were employed as sensing materials applied on the surface of U-beams to detect deformation. In [ 21 ], a polymeric Fano-resonator-based accelerometer was fabricated ( Figure 2 b); when being accelerated, a force was exerted on the ring, which experienced a strain, causing a phase change of the light proportional to the acceleration. This device demonstrated very high sensitivity.…”

Section: Sensors and Sensor-based Odometry Methodsmentioning

confidence: 99%

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Sensors and Sensor Fusion Methodologies for Indoor Odometry: A Review

et al. 2022

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Although Global Navigation Satellite Systems (GNSSs) generally provide adequate accuracy for outdoor localization, this is not the case for indoor environments, due to signal obstruction. Therefore, a self-contained localization scheme is beneficial under such circumstances. Modern sensors and algorithms endow moving robots with the capability to perceive their environment, and enable the deployment of novel localization schemes, such as odometry, or Simultaneous Localization and Mapping (SLAM). The former focuses on incremental localization, while the latter stores an interpretable map of the environment concurrently. In this context, this paper conducts a comprehensive review of sensor modalities, including Inertial Measurement Units (IMUs), Light Detection and Ranging (LiDAR), radio detection and ranging (radar), and cameras, as well as applications of polymers in these sensors, for indoor odometry. Furthermore, analysis and discussion of the algorithms and the fusion frameworks for pose estimation and odometry with these sensors are performed. Therefore, this paper straightens the pathway of indoor odometry from principle to application. Finally, some future prospects are discussed.

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Section: Sensors and Sensor-based Odometry Methodsmentioning

confidence: 99%

“…Copyright IEEE 2019. ( b ) Polymeric Fano-resonator-based accelerometer, reprinted with permission from [ 21 ].Copyright The Optical Society2016. ( c ) Polymeric vibratory ring-type MEMS gyroscope, reprinted with permission from [ 27 ].…”

Section: Sensors and Sensor-based Odometry Methodsmentioning

confidence: 99%

Sensors and Sensor Fusion Methodologies for Indoor Odometry: A Review

et al. 2022

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“…As depicted in Fig. 7(a), the total coupling efficiency remains almost constant regardless of the variations in WEWG, which can be used for applications based on wide waveguides like gyroscopes and accelerometers [37], [38]. Notably, the end of the taper tip is elongated for improving the cleaving tolerance, and the length of the tip waveguide (LTWG) negligibly affects the performance, as shown in Fig.…”

Section: Fabrication and Characterization Of The Proposed Couplermentioning

confidence: 97%

Compact and Broadband Edge Coupler Based on Multi-Stage Silicon Nitride Tapers

Bhandari

Lee

et al. 2020

IEEE Photonics J.

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We have proposed and experimentally realized an ultra-compact and broadband silicon nitride edge-coupler that enables high coupling efficiency. The proposed coupler was realized by concatenating short tapers in four stages, whose angles were designed to minimize the footprint while preserving the coupling efficiency. The constituting taper segments were designed by carefully sectioning a long adiabatic taper while adapting to an appropriate taper angle for each segment. The designed coupler exhibited an extremely short footprint of 76 μm. A coupling efficiency of 92% was experimentally attained at 1550 nm wavelength when coupled to a single-mode fiber having a mode field diameter of ~4 μm. Further, an efficiency of over 90% throughout the C and L bands was observed. A 3-dB bandwidth of 965 nm, spanning λ =1015-1980 nm, was achieved in the simulation. Additionally, the fabricated device exhibited an enhanced cleaving tolerance by virtue of its elongated tip, along with relaxed alignment tolerances ranging up to 3.5 μm. The proposed design was also found to comply with the waveguides having widths between 1 μm and 4 μm without affecting the overall footprint and efficiency. This work is anticipated to provide a promising foundation for the development of compact photonic devices.

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“…Yu Chen et al demonstrated that flexible photonic devices have been manufactured onto flexible substrates without compromising their function and performance [ 26 ]. Moreover, when combining the mechanical flexibility and excellent optical performance, the flexible optical micro-resonators have great potential for applications in optical ultrasonic sensor [ 27 , 28 ], optical accelerometer [ 29 , 30 ], optical strain sensor [ 31 , 32 ] and optical temperature sensor [ 33 , 34 ]. However, the sensing performance of flexible photonic resonators will be seriously damaged in the biochemical sensing application due to the non-biological impact on the device when experiencing mechanical deformation.…”

Section: Introductionmentioning

confidence: 99%

FDTD Simulation: Simultaneous Measurement of the Refractive Index and the Pressure Using Microdisk Resonator with Two Whispering-Gallery Modes

Zhang

et al. 2020

Sensors

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In this paper, an approach to measure both the refractive index (RI) and the pressure simultaneously using two Whispering-Gallery Modes (WGMs) in a microdisk resonator is theoretically proposed. Due to the difference in the energy distribution of the first and second order WGMs, the sensitivity of two modes toward the variation of RI and pressure applied to the device show differences. An RI sensitivity of 29.07 nm/RIU and pressure sensitivity of 0.576 pm/kPa for WGM (1,36), and an RI sensitivity of 38.68 nm/RIU and a pressure sensitivity of 0.589 pm/kPa for WGM (2,28) are obtained through the 3D finite-difference time-domain (3D-FDTD) simulation. Dual parametric sensing can be achieved by solving the second-order inverse sensitivity matrix. Therefore, strain–optical coupling behavior is effectively eliminated. The dual sensing scheme we proposed provides a novel approach to overcome the difficulty of multi-sensing applications based on the flexible photonic device.

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High sensitivity optical waveguide accelerometer based on Fano resonance

Cited by 25 publications

References 34 publications

Sensors and Sensor Fusion Methodologies for Indoor Odometry: A Review

Sensors and Sensor Fusion Methodologies for Indoor Odometry: A Review

Compact and Broadband Edge Coupler Based on Multi-Stage Silicon Nitride Tapers

FDTD Simulation: Simultaneous Measurement of the Refractive Index and the Pressure Using Microdisk Resonator with Two Whispering-Gallery Modes

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