2016
DOI: 10.3390/s16060839
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High Sensitivity pH Sensor Based on Porous Silicon (PSi) Extended Gate Field-Effect Transistor

Abstract: In this study, porous silicon (PSi) was prepared and tested as an extended gate field-effect transistor (EGFET) for pH sensing. The prepared PSi has pore sizes in the range of 500 to 750 nm with a depth of approximately 42 µm. The results of testing PSi for hydrogen ion sensing in different pH buffer solutions reveal that the PSi has a sensitivity value of 66 mV/pH that is considered a super Nernstian value. The sensor considers stability to be in the pH range of 2 to 12. The hysteresis values of the prepared … Show more

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Cited by 76 publications
(49 citation statements)
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“…The sensor considers stability to be in the pH range of 2-12 was considered highly stable for the sensors based on PSi. The hysteresis values of the proposed PSi sensor were approximately 10.5 and 8.2 mV in the high and low pH loop, respectively [47]. Some of the drawbacks of these PSi based sensors include less specificity, high cost and complicated operation.…”
Section: Tg Biosensors Based On Porous Siliconmentioning
confidence: 96%
“…The sensor considers stability to be in the pH range of 2-12 was considered highly stable for the sensors based on PSi. The hysteresis values of the proposed PSi sensor were approximately 10.5 and 8.2 mV in the high and low pH loop, respectively [47]. Some of the drawbacks of these PSi based sensors include less specificity, high cost and complicated operation.…”
Section: Tg Biosensors Based On Porous Siliconmentioning
confidence: 96%
“…, pHPZC corresponds to the pH value for which the surface charge is null, k is the Boltzmann's constant, T is the temperature and β is the buffer capacity, a parameter that characterizes the ability of the sensitive surface to buffer pH changes (β is an inherent property of the sensing material). According to the site-binding model, the number of binding sites on the sensing membrane can change the potential of the electrolytic interface, as well as the potential of the sensing membrane, that is expressed by [74]:…”
Section: Ph Sensorsmentioning
confidence: 99%
“…Macroporous silicon (MPS) has attracted the attention of several groups, owing to the well-known advantages of its large surface area and biocompatibility [ 1 ], as well as its showing promising behavior in several advanced applications, such as gas sensing [ 2 , 3 ], pH sensors [ 4 ], biochips [ 5 ], CMOS devices [ 6 ], drug delivery devices [ 1 ], biosensors [ 7 , 8 ], and in fuel cell devices [ 9 ] and waveguides [ 10 ]. Furthermore, it can be simply integrated with silicon technology processes [ 11 ].…”
Section: Introductionmentioning
confidence: 99%