High sensitivity Pt-doped SnO2 gas sensors fabricated using sol–gel solution on micromachined (100) Si substrates

Silicon-based micro-gas sensors for detecting formaldehyde

“…Many researchers reported on semiconductor formaldehyde gas sensors with different structures, such as ceramic plate structure [17,18], ceramic tube structure [19][20][21][22] and micro-hotplate structure [23,24]. In particular, it is desirable for gas sensors to be fabricated on silicon substrate so as to integrate them with their control circuits [23][24][25][26].…”

Influence of dopant concentrations (Mn = 1, 2 and 3 mol%) on the structural, magnetic and optical properties and photocatalytic activities of SnO2 nanoparticles synthesized via the simple precipitation process

“…The peak positions of all the samples exhibit the rutile type tetragonal structure of SnO 2 , which was confirmed from the JCPDS card no. 41-1445, and indicates the good crystallinity of the obtained nanoparticle[23]. Moreover, it is clear that there are no extra peaks due to manganese metal oxides, implying that the Mn (ionic radius = 0.67Å) ions get substituted at the Sn (ionic radius = 0.69 Å) site without changing the rutile type tetragonal structure.…”

Temperature Optimized Ammonia and Ethanol Sensing Using Ce Doped Tin Oxide Thin Films in a Novel Flow Metric Gas Sensing Chamber

“…Gas sensing characteristics are determined by the material surface nature of the sensing layer to the sensed gas. Morphology of the metal oxide in terms of its size, shape, crystal faces, and dopants added to it plays a dominant role in determining the sensitivity and selectivity of the material towards the sensing gas [33][34][35][36]. Metal oxide based nanocomposites have recently been explored towards gas sensing and have been proven to have enhanced gas sensing abilities even at room temperature [37,38].…”