High sensitivity quadrupole mass spectrometry of neutrals sputtered by UV-laser ablation of polymers

8 Studies on laser ablation of polymers

“…38 continues a series of experimental papers, [62][63][64][65] in which the effect of carbonisation on the polyimide laser ablation kinetics has been considered. It has been shown in these papers 64,65 that during multiple-shot irradiation of polyimide by a KrF excimer laser the increase in etch depth slows down and stops if the fluence is smaller than some 'second threshold' one. Several ways of explaining these phenomena have been suggested in refs.…”

Chemistry of actinide and lanthanide metal ions (M+) in laser ablation of dispersions of inorganic compounds in polyimide and polytetrafluoroethylene

“…3 Although the primary interest has been on materials processing, some studies have additionally characterized ablated species. 6 Vapor species identified in ablation of PI include C 2 and CN; 7 C c H 2 clusters (9ϽcϽ25); 8 small C n clusters such as C 3 , and hydrocarbon molecules such as benzene; 9 acetylene and ethylene; 10 and carbon cluster ions ranging in size from C 3 ϩ to C 60 ϩ and larger fullerenes. 6 Vapor species identified in ablation of PI include C 2 and CN; 7 C c H 2 clusters (9ϽcϽ25); 8 small C n clusters such as C 3 , and hydrocarbon molecules such as benzene; 9 acetylene and ethylene; 10 and carbon cluster ions ranging in size from C 3 ϩ to C 60 ϩ and larger fullerenes.…”

Submicron structural alteration of polycarbonate surface due to ArF laser irradiation at high doses and the subsequent electro-chemical etching treatment

“…For instance, the effect of KrF or ArF lasers on PC at low fluences mainly results in hardening due to skin cross-linking (2,(9)(10)(11)(12)(13)(14)(15). In addition, the slow ablation starts etching with a non-constant ablation rate, while the fast ablation leads to a constant ablation rate (16,17). At shorter wavelengths (λ ≤ 200 nm), photochemical bond breaking becomes noticeable.…”