We present an atomistic understanding
of the evolution of the size
distribution with temperature and number of cycles in atomic layer
deposition (ALD) of Pt nanoparticles (NPs). Atomistic modeling of
our experiments teaches us that the NPs grow mostly via NP diffusion
and coalescence rather than through single-atom processes such as
precursor chemisorption, atom attachment, and Ostwald ripening. In
particular, our analysis shows that the NP aggregation takes place
during the oxygen half-reaction and that the NP mobility exhibits
a size- and temperature-dependent scaling. Finally, we show that contrary
to what has been widely reported, in general, one cannot simply control
the NP size by the number of cycles alone. Instead, while the amount
of Pt deposited can be precisely controlled over a wide range of temperatures,
ALD-like precision over the NP size requires low deposition temperatures
(e.g., T < 100 °C) when growth is dominated
by atom attachment.