High spatial resolution scanning electron microscope: evaluation and structural analysis of nanostructured materials

Terasaki, Osamu; Ma, Yangmin; Sakuda, Yuusuke; Takahashi, Hiroki; Tsutsumi, Ken‐ichi; Asahina, Shunsuke; Kudo, M.; Corker, Robert W.

doi:10.22184/2227-572x.2018.41.4.380.383

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2020

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“…For such materials, low voltage SEM (LV-SEM) instrumentation has developed to the point where highresolution SE imaging of the topography is possible [2][3][4] [5][6][7][8]. Previously, image quality was severely impacted due to charge build-up, deposited contamination and radiation damage to the specimen associated with high electron beam energy, E 0 [9].…”

Section: Introductionmentioning

confidence: 99%

Secondary electron hyperspectral imaging: Nanostructure and chemical analysis for the LV-SEM

Nohl

2020

Materials Science and Technology

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Materials engineers have increasing control over nanoscale chemical composition and nanostructures. The latter can be easily analysed by the scanning electron microscope (SEM) yet nanoscale chemical analysis in the SEM poses challenges. Nevertheless, nanoscale chemical analysis capabilities have been developed in the LV-SEM by secondary electron hyperspectral imaging (SEHI). In this article, the insights that SEHI has provided into well characterised semiconductor, photovoltaic, polymer and hard carbon materials are reviewed. Instrument and experimental considerations for the obtainment of secondary electron hyper-spectra are discussed and recommendations for future analyses in the LV-SEM by SEHI are made.

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Section: Introductionmentioning

confidence: 99%

Secondary electron hyperspectral imaging: Nanostructure and chemical analysis for the LV-SEM

Nohl

2020

Materials Science and Technology

View full text Add to dashboard Cite

show abstract

High spatial resolution scanning electron microscope: evaluation and structural analysis of nanostructured materials

Cited by 1 publication

References 4 publications

Secondary electron hyperspectral imaging: Nanostructure and chemical analysis for the LV-SEM

Secondary electron hyperspectral imaging: Nanostructure and chemical analysis for the LV-SEM

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