1995
DOI: 10.1063/1.114129
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High speed metal-semiconductor-metal photodetector manufactured on GaAs by low-temperature photoassisted metalorganic chemical vapor deposition

Abstract: We report on the photoassisted metalorganic chemical vapor deposition (MOCVD) of high resistivity gallium-arsenide at low-temperature (LT-GaAs). The as-grown GaAs exhibits a resistivity of ∼106 Ω cm and has been used as the active layer of a metal-semiconductor-metal (MSM) Schottky-barrier photodetector. The impulse response of the detector is 4 ps with a dark current of 4 nA at a bias of 2 V. These results are comparable to those obtained from LT-GaAs grown by molecular beam epitaxy (MBE).

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Cited by 6 publications
(2 citation statements)
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“…Soole et al 1 discussed comprehensively the fact that the electric field distribution in the MSM device determines its photoresponse. Based on these discussions, the results obtained would provide a persuasive explanation of the broadening of the impulse response with applied bias seen experimentally 27 and in simulation 19. The simulation shows that the electric field distribution causes the electrons, dominant carriers in the structure, to be driven away from the surface; they are forced to circumvent the depletion region and follow longer paths that increase with bias as shown in Figure 6(a–d).…”
Section: Simulation Results and Discussionmentioning
confidence: 63%
“…Soole et al 1 discussed comprehensively the fact that the electric field distribution in the MSM device determines its photoresponse. Based on these discussions, the results obtained would provide a persuasive explanation of the broadening of the impulse response with applied bias seen experimentally 27 and in simulation 19. The simulation shows that the electric field distribution causes the electrons, dominant carriers in the structure, to be driven away from the surface; they are forced to circumvent the depletion region and follow longer paths that increase with bias as shown in Figure 6(a–d).…”
Section: Simulation Results and Discussionmentioning
confidence: 63%
“…observed widening of the photoresponse waveform for their monolithic LT-GaAs MSM diodes with the bias increase and they attributed this behavior to a change in collection efficiency of carriers that are photogenerated deeply in the device. 38 We did not observed this phenomenon in our MSM diodes on freestanding LT-GaAs and believe that the reason for this discrepancy can be attributed to our optically thin absorbing layer of LT-GaAs. Figure 8(b) shows the dependence ofthe photoresponse amplitude on the excitation power for dc bias of 7.39 V. The observed saturation at the high-voltage levels is, in our opinion, due to the band-filling and electric-fieldscreening effects, as it was earlier observed by us for the PC switch.…”
Section: Resultsmentioning
confidence: 70%