High speed micro positioning system based on coarse/fine pair control

Park, K.H.; Lee, J.H.; Kim, Soohyun; Kwak, Yoon Keun

doi:10.1016/0957-4158(95)00033-2

Cited by 11 publications

(4 citation statements)

References 3 publications

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“…Piezoceramic actuators, with their high stiffness, fast frequency response, and high resolution are increasingly being used in micropositioning applications [1][2][3]. However, piezoceramic actuators also exhibit a form of hysteresis between the output displacement and the input voltage.…”

Section: Introductionmentioning

confidence: 99%

A neural networks based model for rate-dependent hysteresis for piezoceramic actuators

Dong

Tan

Chen

et al. 2008

Sensors and Actuators A: Physical

127

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Section: Introductionmentioning

confidence: 99%

A neural networks based model for rate-dependent hysteresis for piezoceramic actuators

Dong

Tan

Chen

et al. 2008

Sensors and Actuators A: Physical

127

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“…Then a series researches concerning force and accuracy were conducted based on this concept. K. H. Park [8] proposed a coarse/fine pair control system to relieve the difficulty of obtaining high accuracy over large movements. The system is applied to magneto-optical (MO) disk drives to enhance the performance in terms of speed and accuracy.…”

Section: Introductionmentioning

confidence: 99%

A new macro-micro dual drive parallel robot for chromosome dissection

et al. 2012

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This paper presents a parallel-structure system dually driven by six servo motors and six piezoelectric actuators. Due to the combination of macro and micro manipulators which are both of orthogonal structures, the proposed system possesses a concise structure as well as actuation isolation and output motion decoupling properties. By using a glass needle mounted on a six-dimensional force sensor in endpoint operating, this system can be applied to chromosome dissection that to make the whole process more efficient and automatic. The glass needle tip has a stroke of 106 mm in three linear motions and 18.7-arc-degrees in three angle motion directions, with servo motors adopted. It also has the resolution of 20 nanometers with the adoption of piezoelectric actuators. The kinematics, isotropy, decoupling and design considerations of the proposed robot are discussed. Workspace and resolution of both macro and micro manipulators are measured separately. The experiments are also conducted to show its capability in dissecting chromosomes.

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“…To date, many robotic systems have used macro-micro manipulators to solve problems with positioning accuracy, which approach to solving practical engineering problems in recent decades [2][3][4][5][6][7]. Generally, the primary level of the positioning actuator is responsible for macro actuation; it therefore requires a long stroke capability, a high load capacity, and high actuation speeds.…”

Section: Introductionmentioning

confidence: 99%

A novel three-phase excitation piezoelectric motor for macro-micro actuation: integration design, systematic modeling, and experimental evaluation

Qiu

Jin

Wang

et al. 2023

Smart Mater. Struct.

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Macro-micro actuators require complex feedback control systems to obtain high positioning cooperativeness. However, the mechanical connections of macro-micro actuators are generally redundant in terms of their size, which is highly unfavorable for both miniaturization and integration. This paper presents an approach to address this problem based on a novel integration design for a three-phase excitation piezoelectric motor (TPM) that is capable of performing macro-micro actuation by switching its operating mode from resonant to nonresonant. The load capacity of the proposed TPM can reach 0.39 Nm with a maximum speed of 3.82 rad/s (36.5 rpm). This performance is achieved by using a unique triangular flexible stator that contains three piezoelectric stack actuators (PSAs) acting as vibrators and is excited by a three-phase electrical signal. A time-domain electromechanical coupling dynamic model is developed to determine the dynamic behavior of the proposed motor, and the modeling results are validated successfully by experimental results obtained from a fabricated prototype. The proposed motor is expected to be helpful for integration design of piezoelectric devices that require macro-micro actuation.

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High speed micro positioning system based on coarse/fine pair control

Cited by 11 publications

References 3 publications

A neural networks based model for rate-dependent hysteresis for piezoceramic actuators

A neural networks based model for rate-dependent hysteresis for piezoceramic actuators

A new macro-micro dual drive parallel robot for chromosome dissection

A novel three-phase excitation piezoelectric motor for macro-micro actuation: integration design, systematic modeling, and experimental evaluation

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