High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

Harada, Y.; Hishinuma, R.; Spătaru, Nicolae; Sakurai, Yusei; Miyasaka, Kazuya; Terashima, Chiaki; Uetsuka, Hiroshi; Suzuki, Norihiro; Fujishima, Akira; Kondo, Takeshi; Yuasa, Makoto

doi:10.1016/j.diamond.2018.12.013

Cited by 14 publications

(6 citation statements)

References 23 publications

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“…The CVD technique allows the formation of large-area layers of high-quality PCD material [21,23]. Although the CVD technology has been developed for more than 30 years [25], the existing CVD machines are still being improved, and novel and unorthodox reactors are constantly being designed [26][27][28][29].…”

Section: Introductionmentioning

confidence: 99%

Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD

et al. 2020

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In this work, the substrate holders of three principal geometries (flat, pocket, and pedestal) were designed based on E-field simulations. They were fabricated and then tested in microwave plasma-assisted chemical vapor deposition process with the purpose of the homogeneous growth of 100-μm-thick, low-stress polycrystalline diamond film over 2-inch Si substrates with a thickness of 0.35 mm. The effectiveness of each holder design was estimated by the criteria of the PCD film quality, its homogeneity, stress, and the curvature of the resulting “diamond-on-Si” plates. The structure and phase composition of the synthesized samples were studied with scanning electron microscopy and Raman spectroscopy, the curvature was measured using white light interferometry, and the thermal conductivity was measured using the laser flash technique. The proposed pedestal design of the substrate holder could reduce the stress of the thick PCD film down to 1.1–1.4 GPa, which resulted in an extremely low value of displacement for the resulting “diamond-on-Si” plate of Δh = 50 μm. The obtained results may be used for the improvement of already existing, and the design of the novel-type, MPCVD reactors aimed at the growth of large-area thick homogeneous PCD layers and plates for electronic applications.

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Section: Introductionmentioning

confidence: 99%

Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD

et al. 2020

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“…Deposition of diamond coatings using chemical vapor deposition [26][27][28] is a cost-efficient approach to obtain the unusual properties of diamond on a metal, glass, ceramic, or composite surface [1-13, 79-81, 102, 103]. Hot filament chemical vapor deposition and microwave plasma-enhanced chemical vapor deposition [26][27][28]91] are commonly used to deposit nanostructured diamond coatings. This approach involves the deposition of carbon atoms that originate from the chemical reactions of carbon-containing gas precursors on a solid substrate.…”

Section: Processing Of Nanocrystalline Diamondmentioning

confidence: 99%

“…3-6 nm diamond nanoparticles (also known as nanodiamond) were initially prepared in the 1960s using a detonation process; these materials have traditionally found use in the preparation of composite coatings and lubricants [5,[15][16][17][18][19]. A variety of methods have been used to prepare nanostructured diamond, including laser ablation [20][21][22][23][24], high energy ball milling [25], microwave plasma-enhanced chemical vapor deposition [26,27], hot filament chemical vapor deposition [28], low temperature neutral beam enhanced chemical vapor deposition [29], extraction of silicon from silicon carbide with a chlorine-bearing gas [30], irradiation of graphite with high energy ions at room temperature [31], and electron irradiation of carbon onions [32][33][34][35].…”

Section: Introductionmentioning

confidence: 99%

Nanostructured diamond for biomedical applications

et al. 2021

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Nanostructured forms of diamond have been recently considered for use in a variety of medical devices due to their unusual biocompatibility, corrosion resistance, hardness, wear resistance, and electrical properties. This review considers several routes for the synthesis of nanostructured diamond, including chemical vapor deposition, hot filament chemical vapor deposition, microwave plasma-enhanced chemical vapor deposition, radio frequency plasma-enhanced chemical vapor deposition, and detonation synthesis. The properties of nanostructured diamond relevant to medical applications are described, including biocompatibility, surface modification, and cell attachment properties. The use of nanostructured diamond for bone cell interactions, stem cell interactions, imaging applications, gene therapy applications, and drug delivery applications is described. The results from recent studies indicate that medical devices containing nanostructured diamond can provide improved functionality over existing materials for the diagnosis and treatment of various medical conditions.

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“…More importantly, the high density and strong internal pressure of the solution environment lead to weaker kinetic energy of the plasma, which facilitates the gentle surface modification of photocatalysts without changing the bulk properties. Therefore, SP has attracted extensive attention in recent years as a powerful tool for the surface structure design of photocatalysts [49][50][51][52][53][54][55][56][57].…”

Section: Introductionmentioning

confidence: 99%

Solution Plasma for Surface Design of Advanced Photocatalysts

Wang,

Xing

et al. 2023

Catalysts

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Rational design of the surface of photocatalysts can conveniently modulate the photo-stimulated charge separation, influence the surface reaction kinetics, and other pivotal factors in the photocatalytic processes for efficient photocatalysis. Solution plasma, holding promise for mild modification of the surface structure of materials, has recently been recognized as an emerging technology for surface engineering of high-performance photocatalysts. In this review, we will briefly introduce the fundamentals of solution plasma and its applications in materials preparation and summarize the recent research progress in the surface design of advanced photocatalysts by solution plasma. Lastly, we will indicate some possible new directions. This review is expected to provide an instructive guideline for the surface design of heterogeneous photocatalysts by solution plasma.

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High-speed synthesis of heavily boron-doped diamond films by in-liquid microwave plasma CVD

Cited by 14 publications

References 23 publications

Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD

Effect of Substrate Holder Design on Stress and Uniformity of Large-Area Polycrystalline Diamond Films Grown by Microwave Plasma-Assisted CVD

Nanostructured diamond for biomedical applications

Solution Plasma for Surface Design of Advanced Photocatalysts

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