1995
DOI: 10.1109/2944.473666
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High-speed UV micro-machining of polymers with frequency-doubled copper vapor lasers

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Cited by 28 publications
(9 citation statements)
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“…Glover et al [39] demonstrated that high beam quality frequency double CVL can enhance the material removal rate per pulse of polymers. They showed that at very high frequency the UV-CVL can give 100 times faster production than the excimer laser.…”
Section: Lbmm Using Copper Vapor Lasers (Cvls)mentioning
confidence: 98%
“…Glover et al [39] demonstrated that high beam quality frequency double CVL can enhance the material removal rate per pulse of polymers. They showed that at very high frequency the UV-CVL can give 100 times faster production than the excimer laser.…”
Section: Lbmm Using Copper Vapor Lasers (Cvls)mentioning
confidence: 98%
“…With an average power of 1.8 W and a pulse width of ∼3.6 ps we expect this UV source to exceed the threshold for a synchronously pumped optical parametric oscillator to generate tunable visible and UV radiation [9,10]. Additionally this system could potentially be used for time resolved spectroscopy and micro-machining [11].…”
Section: L41mentioning
confidence: 99%
“…[1][2][3] In case of metals, the Nd:YAG laser is commonly used because of its high peak power, ability to be run at wide range of pulse width ͑ms-ns͒, and high repetition rate. For an effective use of the laser beam in micromachining, process parameters such as laser power, pulse width, repetition rate, focal position, pulse overlap, incident angle, and number of pulses must be optimized.…”
Section: Introductionmentioning
confidence: 99%