High-/spl kappa/ HfO2/TiO2/HfO2 multilayer quantum well flash memory devices

Maikap, S.; Tzeng, Pei-Jer; Tseng, S. S.; Wang, T.-Y.; Lin, Che-Hsin; Lee, H.Y.; Wang, C.C.; Tien, Ta–Chang; Lee, L.S.; Li, P.W.; Yang, Jer−Ren; Tsai, Ming-Jinn

doi:10.1109/vtsa.2007.378900

2007 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA) 2007

DOI: 10.1109/vtsa.2007.378900

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High-/spl kappa/ HfO2/TiO2/HfO2 multilayer quantum well flash memory devices

S. Maikap

Pei-Jer Tzeng

S. S. Tseng

et al.

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High-/spl kappa/ HfO2/TiO2/HfO2 multilayer quantum well flash memory devices

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