High Strength and Deformation Mechanisms of Al0.3CoCrFeNi High-Entropy Alloy Thin Films Fabricated by Magnetron Sputtering

Abstract

Recently, high-entropy alloy thin films (HEATFs) with nanocrystalline structures and high hardness were developed by magnetron sputtering technique and have exciting potential to make small structure devices and precision instruments with sizes ranging from nanometers to micrometers. However, the strength and deformation mechanisms are still unclear. In this work, nanocrystalline Al 0.3 CoCrFeNi HEATFs with a thickness of~4 µm were prepared. The microstructures of the thin films were comprehensively characterized, and the mechanical properties were systematically studied. It was found that the thin film was smooth, with a roughness of less than 5 nm. The chemical composition of the high entropy alloy thin film was homogeneous with a main single face-centered cubic (FCC) structure. Furthermore, it was observed that the hardness and the yield strength of the high-entropy alloy thin film was about three times that of the bulk samples, and the plastic deformation was inhomogeneous. Our results could provide an in-depth understanding of the mechanics and deformation mechanism for future design of nanocrystalline HEATFs with desired properties.

Frictional Wear and Corrosion Behavior of AlCoCrFeNi High-Entropy Alloy Coatings Synthesized by Atmospheric Plasma Spraying

“…As such, investigations of HEA coatings (HEACs) is one of the upcoming research fields where there is a growing interest among the material scientists and engineers. To date, numerous technologies have been applied to fabricate HEACs [ 16 , 17 ], such as magnetron sputtering [ 18 , 19 ], laser cladding [ 20 , 21 ], spraying [ 22 , 23 , 24 ], electrodeposition [ 25 ] and plasma cladding [ 26 ], which have proved that HEACs can exhibit excellent mechanical and physical properties, for instance, high hardness, wear and corrosion resistance and good and appealing electrical and magnetic properties, as well as excellent performance at high temperatures [ 16 , 17 ].…”

Review of Recent Research on AlCoCrFeNi High-Entropy Alloy

“…Liao et al fabricated an Al 0.3 CoCrFeNi film through magnetron sputtering. Magnetron sputtering offers the possibility of fabricating small structure devices and micro instruments [97]. The high-entropy AlCoCrFeNi 2.1 alloy can be used for ship propellers due to its corrosion resistance and good casting properties [98].…”

New Advances in High-Entropy Alloys

“…With the help of their excellent mechanical properties, high-entropy thin film developed by a magnetron sputtering technique has attracted attention, which has exciting potential to make small-structure devices and precision instruments with sizes ranging from nanometers to micrometers. Liao et al [ 34 ] fabricated Al 0.3 CoCrFeNi film, and Zhang et al [ 35 ] prepared (Al 0.5 CrFeNiTi 0.25 )N x high-entropy films. It showed that the phase structure changes from the amorphous to the face-centered cubie (FCC) structure with increasing N content, which was proved to be related with the atomic size difference in the alloy system.…”