High Temperature Capacitive Pressure Sensor Employing a SiC Based Ring Oscillator

Abstract

In an effort to develop harsh environment electronic and sensor technologies for aircraft engine safety and monitoring, we have used capacitive-based pressure sensors to shift the frequency of a SiCelectronics-based oscillator to produce a pressure-indicating signal that can be readily transmitted, e.g. wirelessly, to a receiver located in a more benign environment. Our efforts target 500 °C, a temperature well above normal operating conditions of commercial circuits but within areas of interest in aerospace engines, deep mining applications and for future missions to the Venus atmosphere. This paper reports for the first time a ring oscillator circuit integrated with a capacitive pressure sensor, both operating at 500 °C. This demonstration represents a significant step towards a wireless pressure sensor that can operate at 500 °C and confirms the viability of 500 °C electronic sensor systems.