2018
DOI: 10.3390/ma11071119
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High-Temperature Molecular Beam Epitaxy of Hexagonal Boron Nitride with High Active Nitrogen Fluxes

Abstract: Hexagonal boron nitride (hBN) has attracted a great deal of attention as a key component in van der Waals (vdW) heterostructures, and as a wide band gap material for deep-ultraviolet devices. We have recently demonstrated plasma-assisted molecular beam epitaxy (PA-MBE) of hBN layers on substrates of highly oriented pyrolytic graphite at high substrate temperatures of ~1400 °C. The current paper will present data on the high-temperature PA-MBE growth of hBN layers using a high-efficiency radio-frequency (RF) ni… Show more

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Cited by 21 publications
(14 citation statements)
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“…More details about the sample growth conditions and the MBE system can be found elsewhere. 53,[120][121][122] STM/STS STM and STS measurements were performed under ultra-high vacuum (UHV) conditions at low-temperatures using a modified RHK PanScan FlowCryo microscope. This STM was adapted to receive a high numerical aperture light collection and injection system with optimized transmission.…”
Section: Methods Sample Preparationsmentioning
confidence: 99%
“…More details about the sample growth conditions and the MBE system can be found elsewhere. 53,[120][121][122] STM/STS STM and STS measurements were performed under ultra-high vacuum (UHV) conditions at low-temperatures using a modified RHK PanScan FlowCryo microscope. This STM was adapted to receive a high numerical aperture light collection and injection system with optimized transmission.…”
Section: Methods Sample Preparationsmentioning
confidence: 99%
“…Unlike the MBE growth of wurtzite III-nitrides, which demonstrate smooth, epitaxial growth under metal-rich flux ratios, optimal growth conditions for hBN are under an excess of active nitrogen. While a recent report suggests an influence of active N flux on hBN morphology on HOPG, the ratelimiting element, boron, will govern the overall morphology and growth rate of these films [29]. Therefore, in this work, the nitrogen flux was kept constant while the boron flux and the substrate temperature were varied.…”
Section: Methodsmentioning
confidence: 99%
“…Among them, PA-MBE has an exact growth control to produce high-quality epitaxy and at lower growth temperatures than others [12,13]. h-BN has also attracted attention for the growth on various substrates, such as Ni [10,14], graphene [15,16], cobalt [17,18], and sapphire [19,20].…”
Section: Introductionmentioning
confidence: 99%