“…The ReaxFF has been parameterized and tested for a great variety of processes: chemical reactions on solid surfaces (e.g., dissociation of water on titania [23,24], hyperthermal oxidation of Si(100) by O and O2 [25,26,27,28],..), gas-phase reactions (e.g., n-heptane pyrolysis [29], oxidation of toluene [30],..), aqueous reactions (e.g., aqueous chloride and cooper chloride/water systems [31],..), reactions in zeolites (e.g., methanol to olefin reactions [32], confined reactive water in minerals [33],..), etc. In particular, there are studies about the oxidation of silica by O and O2 [7,34,35] and oxidation of silicon carbide by O2 and H2O [36,37], which are very related with the present work (i.e., CO/O/SiO2 system).…”