High thermal performance of μ-stripes quantum cascade laser

Naurois, G. M. de; Simozrag, B.; Maisons, G.; Trinité, Virginie; Alexandre, François; Carras, Mathieu

doi:10.1063/1.4739004

Cited by 11 publications

(4 citation statements)

References 7 publications

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“…These high index planes can enhance the growth rate close to the ridge leading to quick planarization compared to the region far from the ridge where growth is largely dominated by growth from (100) plane. Such a growth mechanism is especially very important to planarize ridge structures of different spacing and height such as microstripe QCL design (19), whose cross sectional SEM images before and after regrowth is given in Figure 5. Regardless of the height difference between mesas containing the array and the microstripes, good planarization with no "rabbit ear" at the ridge edge is achieved.…”

Section: Resultsmentioning

confidence: 99%

A Quick and a Flexible Hydride Vapor Phase Epitaxy Process to Achieve Buried Heterostructure Quantum Cascade Lasers

Metaferia

Simozrag

Junesand³

et al. 2014

ECS Trans.

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BH-QCLs were fabricated with regrowth of semi-insulating InP:Fe in hydride vapor phase epitaxy reactor. Two types of lateral ridge QCL designs were considered: (i) closely spaced ridges with double trenches and (ii) widely and uniformly spaced ridges. The etched depth varies from 6 to 15 µm in the former and 6 to10 µm in the latter. Double trenches of about 14 µm deep take only < 40 minutes to planarize while the same time is needed to planarize about 8 µm deep trenches with uniform ridges. In any case the achieved growth rate is higher by at least one order of magnitude than that can be achieved in MBE and MOVPE. Some fabricated BH-QCLs are characterized and they exhibit spatially monomode (TMoo) laser with an output power of as high as 2.4 W and wall plug efficiency of ~8-9% at RT under CW operation.

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Section: Resultsmentioning

confidence: 99%

A Quick and a Flexible Hydride Vapor Phase Epitaxy Process to Achieve Buried Heterostructure Quantum Cascade Lasers

Metaferia

Simozrag

Junesand³

et al. 2014

ECS Trans.

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show abstract

“…We also conducted in a separate experiment regrowth around µ-striped QCL 23 (not treated here). It is clearly seen that our regrowth process yields the most desirable planarization without any rabbit ear formation.…”

Section: 7 µM Qclmentioning

confidence: 99%

Demonstration of a quick process to achieve buried heterostructure QCL leading to high power and wall plug efficiency

et al. 2014

Self Cite

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Together with the optimal basic design, buried heterostructure quantum cascade laser (BH-QCL) with semi-insulating regrowth offers unique possibility to achieve an effective thermal dissipation and lateral single mode. We demonstrate here for the first time realization of BH-QCLs with a single step regrowth of highly resistive (>1x10 8 ohm·cm) semiinsulating InP:Fe in less than 45 minutes in a flexible hydride vapour phase epitaxy process for burying ridges etched down to 10-15 µm deep both with and without mask overhang. The fabricated BH-QCLs emitting at ~4.7 µm and ~5.5 µm were characterized. 2 mm long 5.5 µm lasers with ridge width 17-22 µm, regrown with mask overhang, exhibited no leakage current. Large width and high doping in the structure did not permit high current density for CW operation. 5 mm long 4.7 µm BH-QCLs of ridge widths varying from 6-14 µm regrown without mask overhang, besides being spatially monomode, TM 00 , exhibited WPE of ~8-9% with an output power of 1.5 -2.5 W at room temperature and under CW operation. Thus, we demonstrate a simple, flexible, quick, stable and single-step regrowth process with extremely good planarization for realizing buried QCLs leading to monomode, high power and high WPE.

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“…Then a narrowing of the emission beam was demonstrated for a two elements array [27]. Later that year, de Naurois et al developed this buried heterostructure technology, scaled the stripe array comprising up to 16 emitters, while controlling the thermal resistance in a low level [28,29].…”

Section: Brief Review Of Qcl Arraysmentioning

confidence: 99%

“…Obtaining the coherence within an array relies on the ability to control the coupling between individual lasers. Inspired by concepts developed in more mature, shorter wavelength diode laser systems, several coupling schemes, including coupling through exponentially decaying fields outside the high index dielectric core (evanescent-wave coupled) [27][28][29], through feedback from external reflectors (diffraction-wave coupled) [30], connecting two ridges to one single-mode waveguide (Y coupled or tree coupled) [31][32][33][34][35], through lateral propagating waves (leaky-wave coupled) [36][37][38] and combining gradedphotonic-heterostructure (GPH) QCLs with a ring resonator [39], have exhibited excellent performance on phase-locking QCL arrays, especially in mid-infrared range.…”

Section: Brief Review Of Qcl Arraysmentioning

confidence: 99%

Power Amplification and Coherent Combination Techniques for Terahertz Quantum Cascade Lasers

Xie¹,

Li²,

Wang³

et al. 2017

Quantum Cascade Lasers

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Power amplification and coherent combination are important ways to improve the output power and beam quality of single-mode terahertz quantum cascade lasers (THz QCLs). Up to date, the tapered waveguide is the most convenient way to amplify the power of THz QCLs. The self-focusing effect in tapered THz QCLs induces nonmonotonic behaviours of the peak power and far-field beam divergence, which lead to the existence of optimal structural parameters. The surface and lateral grating techniques have also been employed in tapered THz QCLs to further improve the spectral purity. For coherent combinations, the progress of facet-emitting phase-locked arrays of THz QCLs is still limited due to both the lack of the understanding of dynamics of coupled QCLs and the difficulties in designing high-performance coupled waveguides. We will briefly review the developments of coherent arrays of THz QCLs and present a design of monolithic QCL arrays with common coupled cavity to achieve the optical mutual injection, which may provide a new way for coherent combination of THz QCLs.

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High thermal performance of μ-stripes quantum cascade laser

Cited by 11 publications

References 7 publications

A Quick and a Flexible Hydride Vapor Phase Epitaxy Process to Achieve Buried Heterostructure Quantum Cascade Lasers

A Quick and a Flexible Hydride Vapor Phase Epitaxy Process to Achieve Buried Heterostructure Quantum Cascade Lasers

Demonstration of a quick process to achieve buried heterostructure QCL leading to high power and wall plug efficiency

Power Amplification and Coherent Combination Techniques for Terahertz Quantum Cascade Lasers

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