“…1,2 Nowadays, nanofluidics has become a fundamental and critical technique to study nano-scale fluidic, molecular, and ion properties due to the special phenomena that only occur in nanochannels. 1,3,4 In recent years, a substantial amount of research on nanofluidic chips has been reported, such as protein analysis, 5-7 DNA stretching, 8,9 virus characterization, 10 and ion separation. [11][12][13] Different Si/silica nanofluidic chips have been fabricated by using reactive ion etching, 14,15 electron beam, 16 focused ion beam, 17,18 and proton beam technique.…”