High throughput PIAD with an advanced RF-plasma source and direct optical monitoring

Zöller, A.; Arhilger, Detlef; Boos, Michael; Hagedorn, Harro; Reus, Holger

doi:10.1364/oic.2016.wa.8

Cited by 1 publication

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“…The cumulative effect of the thickness errors is reduced by using several witness chips that can be changed after the deposition of a certain number of layers. The described monitoring arrangement was initially developed for the monochromatic monitoring of coating production, but it can be also applied for layer thickness control with broadband monitoring strategies [15,16].…”

Section: Introductionmentioning

confidence: 99%

Online Characterization Algorithms for Optical Coating Production with Broadband Monitoring

et al. 2018

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Algorithms for the online determination of thicknesses of already-deposited layers are important for the reliable control of optical coating production. Possible ways of constructing such algorithms in the case of coating production with direct broadband monitoring are discussed. A modified triangular algorithm is proposed. In contrast to the well-known triangular algorithm, the new algorithm does not determine all thicknesses of previously deposited layers but only those for which an increase in the accuracy of their determination is to be expected. The most promising algorithms are compared in terms of their accuracy and operational speed. It is shown that the modified triangular algorithm is much faster than the triangular algorithm, and both algorithms have close accuracy. The operational speed of the modified triangular algorithm can be a decisive factor for its use in modern broadband monitoring systems.

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Section: Introductionmentioning

confidence: 99%