Phys. Chem. Chem. Phys.
 2024
DOI: 10.1039/d4cp00171k
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High throughput screening of pure silica zeolites for CF4 capture from electronics industry gas

Hui-Dong Zhang,
Xiao-Dong Li,
Yan-Yu Xie
et al.

Abstract: The capture and separation of CF4 from CF4/N2 mixture gas is a crucial issue in the electronics industry, as CF4 is a commonly used etching gas and the ratio of...

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