High-uniformity post-CMOS uncooled microbolometer focal plane array integrated with active matrix circuit

Kim, Gyungtae; Kim, Heeyeoun; Kim, Tae Hyun; Seo, Jindeok; Ko, Hyoungho

doi:10.1016/j.sna.2014.01.043

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Cited by 2 publications

References 7 publications

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Selection of Ideal Operating Point for Infrared Camera System

Čech

Rozkovec

2018

2018 International Conference on Applied Electronics (AE)

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The paper presents identification of temperature range and gain parameters of long wave infrared camera. Various characteristics of tunable parameters of microbolometer focal plane array were acquired and the optimal operating point was accordingly selected. The camera temperature characteristic and noise-equivalent temperature difference was measured for selected operating point. Results will be used in a project called robust detection system, where there are special requirements to be met.

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Selection of Ideal Operating Point for Infrared Camera System

Čech

Rozkovec

2018

2018 International Conference on Applied Electronics (AE)

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Electro-Thermal Modeling and Experimental Validation of Integrated Microbolometer with ROIC

Kim¹,

Kim²,

Kim³

et al. 2016

JSTS:Journal of Semiconductor Technology and Science

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Abstract-This paper presents an electro-thermal modeling of an amorphous silicon (a-Si) uncooled microbolometer.This modeling provides a comprehensive solution for simulating the electrothermal characteristics of the fabricated microbolometer and enables electro-thermal cosimulation between MEMS and CMOS integrated circuits. To validate this model, three types of uncooled microbolometers were fabricated using a post-CMOS surface micromachining process. The simulation results show a maximum discrepancy of 2.6% relative to the experimental results.

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High-uniformity post-CMOS uncooled microbolometer focal plane array integrated with active matrix circuit

Cited by 2 publications

References 7 publications

Selection of Ideal Operating Point for Infrared Camera System

Selection of Ideal Operating Point for Infrared Camera System

Electro-Thermal Modeling and Experimental Validation of Integrated Microbolometer with ROIC

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