2006
DOI: 10.1117/12.672393
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High-voltage-compatable, fully depleted CCDs

Abstract: We describe charge-coupled device (CCD) development activities at the Lawrence Berkeley National Laboratory (LBNL). Back-illuminated CCDs fabricated on 200-300 µm thick, fully depleted, high-resistivity silicon substrates are produced in partnership with a commercial CCD foundry. The CCDs are fully depleted by the application of a substrate bias voltage. Spatial resolution considerations require operation of thick, fully depleted CCDs at high substrate bias voltages. We have developed CCDs that are compatible … Show more

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Cited by 23 publications
(25 citation statements)
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“…The CCDs are depleted through application of a substrate bias voltage across the full thickness. The spatial resolution can be improved by increasing the bias voltage up to 200 V [3], with a nominal operating voltage of 100 V for the SNAP mission. The SNAP focal plane will be populated with 36 LBNL CCDs, each having 3512 × 3512 10.5 µm pixels.…”
Section: Ccd Requirementsmentioning
confidence: 99%
See 1 more Smart Citation
“…The CCDs are depleted through application of a substrate bias voltage across the full thickness. The spatial resolution can be improved by increasing the bias voltage up to 200 V [3], with a nominal operating voltage of 100 V for the SNAP mission. The SNAP focal plane will be populated with 36 LBNL CCDs, each having 3512 × 3512 10.5 µm pixels.…”
Section: Ccd Requirementsmentioning
confidence: 99%
“…With a diffraction limited point spread function (PSF) of 0.1 arcseconds at 800 nm and zodiacal-dominated background, SNAP will have significantly improved resolution and decreased contamination from sky background compared to ground based telescopes. The SNAP focal plane design uses thick, fully depleted CCDs developed at LBNL [2], [3] for visible to near IR observations in six bandpass filters. In space, these detectors will be exposed to significant radiation, primarily solar protons.…”
Section: Introductionmentioning
confidence: 99%
“…The 4114 × 2040 pixel p-channel CCD is back-illuminated CCD and fully depleted throughout its 250 μm thickness by a 60V positive bias applied to the transparent conductive Indium Tin Oxide layer which also serves as a layer in the anti-reflection coating [2]. The thickness offers excellent sensitivity in the far red and virtually eliminates fringing while the lateral charge diffusion remains small compared to the 15µm pixel and insignificant compared to the typical 2.5 pixel (37.5 µm) spectral line width (FWHM).…”
Section: Ccd Descriptionmentioning
confidence: 99%
“…It is a p-channel back-illuminated CCD with serial registers on the long sides of the CCD, 250 μm thick and fully depleted [2]. The pixel size is 15 microns.…”
Section: Introductionmentioning
confidence: 99%
“…Fully depleted thick back-illuminated p-channel charge-coupled devices (CCD's) developed at Lawrence Berkeley National Laboratory (LBNL) for astronomical applications have useful quantum efficiencies (QE's) extending into the near infrared (IR) [1,2]. The response is limited to < ∼ 1100 nm by the indirect bandgap of silicon.…”
Section: Introductionmentioning
confidence: 99%