High volume fabrication of customised nanopore membrane chips

Heyderman, Laura J.; Ketterer, B.; Bächle, D.; Glaus, F.; Haas, Benedikt; Schift, Helmut; Vogelsang, Konrad; Gobrecht, J.; Tiefenauer, Louis; Dubochet, Olivier; Surbled, P.; Hessler, T.

doi:10.1016/s0167-9317(03)00073-x

Cited by 53 publications

(40 citation statements)

References 15 publications

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“…47 Such nanopore arrays in a silicon nitride membrane were hydrophobically functionalized and bilayers are formed by the painting method ͑Fig. 1͒.…”

Section: Preliminary Results Using Nanopore Arrays To Support Lipmentioning

confidence: 99%

Nano for bio: Nanopore arrays for stable and functional lipid bilayer membranes (Mini Review)

Tiefenauer¹,

Studer²

2008

Biointerphases

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“…47 Such nanopore arrays in a silicon nitride membrane were hydrophobically functionalized and bilayers are formed by the painting method ͑Fig. 1͒.…”

Section: Preliminary Results Using Nanopore Arrays To Support Lipmentioning

confidence: 99%

Nano for bio: Nanopore arrays for stable and functional lipid bilayer membranes (Mini Review)

Tiefenauer¹,

Studer²

2008

Biointerphases

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“…Silicon pores have adjustable surface properties through chemical functionalization and are readily integrated into lab-on-a-chip devices. 9,11,[28][29][30] Porous silicon membranes have been created with a range of microfabrication techniques including focused ion beam (FIB) and e-beam lithography (EBL). For instance, Tong et al fabricated 25-nm-diameter cylindrical pores in 10-nmthick silicon nitride film by FIB.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of functional silicon-based nanoporous membranes

Ileri

Stroeve

Palazoğlu

et al. 2012

J. Micro/Nanolith. MEMS MOEMS

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Abstract. Macroscopic porous membranes with pore diameter uniformity approaching the nanometer scale have great potential to significantly increase the speed, selectivity, and efficiency of molecular separations. We present fabrication, characterization, and molecular transport evaluation of nanoporous thin silicon-based sieves created by laser interferometric lithography (LIL). This fabrication approach is ideally suited for the integration of nanostructured pore arrays into larger microfluidic processing systems, using a simple all-silicon lithographic process. Submillimeter-scale planar arrays of uniform cylindrical and pyramidal nanopores are created in silicon nitride and silicon, respectively, with average pore diameters below 250 nm and significantly smaller standard error than commercial polycarbonate track etched (PCTE) membranes. Molecular transport properties of short cylindrical pores fabricated by LIL are compared to those of thicker commercial PCTE membranes for the first time. A 10-fold increase in pyridine pore flux is achieved with thin membranes relative to commercial sieves, without any modification of the membrane surface.

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“…Consequently, the application of these membranes results in a large pressure drop and restricts the throughput of the fluid in the device (Baker 2004). Monodisperse microsieves (usually in silicon) have a low pressure drop (Kuiper et al 1998;Heyderman et al 2003) but the actual implementation in a microfluidic device is complicated and laborious. Moreover, the sealing of devices with microsieves often poses a serious problem (De Jong et al 2006).…”

Section: Introductionmentioning

confidence: 99%

In-situ fabrication of polymer microsieves for μTAS by slanted angle holography

Prenen

Knopf

Bastiaansen

et al. 2010

Microfluid Nanofluid

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We present a simple, versatile method for the in-situ fabrication of membranes inside a microfluidic channel during a chip manufacturing process using only two extra slanted angle holographic exposure steps. This method combines the strengths of both inclined UV exposure and holographic lithography to produce micrometer-sized three-dimensional sieving structures. Using a common chip material, the photoresist material SU-8, together with this method, a leak-free membranechannel connection is obtained. The resulting membranes are monodisperse, with a very well-defined pore geometry (i.e., microsieves with a pore diameter between 500 nm and 10 lm) that is easily controllable with the holographic set-up. The selectivity of in-situ fabricated microsieves with a pore diameter of 2 lm will be demonstrated using polystyrene beads of 1 and 3 lm.

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High volume fabrication of customised nanopore membrane chips

Cited by 53 publications

References 15 publications

Nano for bio: Nanopore arrays for stable and functional lipid bilayer membranes (Mini Review)

Nano for bio: Nanopore arrays for stable and functional lipid bilayer membranes (Mini Review)

Fabrication of functional silicon-based nanoporous membranes

In-situ fabrication of polymer microsieves for μTAS by slanted angle holography

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