High-yield growth kinetics and spatial mapping of single-walled carbon nanotube forests at wafer scale

Meshot, Eric R.; Park, Sei Jin; Buchsbaum, Steven F.; Jue, Melinda L.; Kuykendall, Tevye; Schaible, Eric; Aji, L. B. Bayu; Kucheyev, S. O.; Wu, Kuang Jen; Fornasiero, Francesco

doi:10.1016/j.carbon.2019.12.023

Cited by 15 publications

(24 citation statements)

References 62 publications

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“…Two-minutes was chosen as the best pretreatment time for all subsequent growth experiments, due to its more sizable growth. The main growth step was carried out for 20 min . in a total flow rate of 150 sccm for acetylene and argon.…”

Section: Methodsmentioning

confidence: 99%

Quality and Quantity of Carbon Nanotube Arrays Grown in Different Pressures and Temperatures Across Absorption-, Surface-, and Diffusion-Controlled Regimes

Radman

Baniadam

Maghrebi

et al. 2020

Ind. Eng. Chem. Res.

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The unpredictability of different operational parameters has rendered finding the optimum conditions for carbon nanotube (CNT) growth particularly challenging. This study attempts to explore the effect of temperature and pressure based on the growth regimes suggested by Lebedeva et al. (Carbon 2011, 49, 2508−2521. While the absorption regime resulted in premature growth, the surface-and diffusion-controlled ones showed a remarkable growth of carbon products. Along with these two regimes, the diameter, array height, and quality of CNTs generally increased with an increase in temperature, but these parameters experienced a reduction near the boundary between two regimes. Just before this reduction, the location may be considered as the optimum condition for growing tall arrays of high-quality CNTs. The quality and quantity of the grown CNTs improved as the pressure increased up to 7000 Pa.

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Section: Methodsmentioning

confidence: 99%

Quality and Quantity of Carbon Nanotube Arrays Grown in Different Pressures and Temperatures Across Absorption-, Surface-, and Diffusion-Controlled Regimes

Radman

Baniadam

Maghrebi

et al. 2020

Ind. Eng. Chem. Res.

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“…We developed wafer-scale membranes with a precisely quantified, high density of small-diameter CNTs as the conductive pores. We leveraged our previous CNT synthesis achievements [34] to produce single-walled CNTs (SWC-NTs) with diameters below 4 nm and densities exceeding 10 12 tubes cm −2 on 100 mm silicon wafers. We demonstrate that 60 cm 2 membranes made from these large-area forests display the same transport and selectivity properties as 1 cm 2 samples, indicating that a negligibly low defect density can be maintained with scale up.…”

Section: Doi: 101002/advs202001670mentioning

confidence: 99%

Ultra‐Permeable Single‐Walled Carbon Nanotube Membranes with Exceptional Performance at Scale

et al. 2020

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Enhanced fluid transport in single-walled carbon nanotubes (SWCNTs) promises to enable major advancements in many membrane applications, from efficient water purification to next-generation protective garments. Practical realization of these advancements is hampered by the challenges of fabricating large-area, defect-free membranes containing a high density of open, small diameter SWCNT pores. Here, large-scale (≈60 cm 2) nanocomposite membranes comprising of an ultrahigh density (1.89 × 10 12 tubes cm −2) of 1.7 nm SWCNTs as sole transport pathways are demonstrated. Complete opening of all conducting nanotubes in the composite enables unprecedented accuracy in quantifying the enhancement of pressure-driven transport for both gases (>290× Knudsen prediction) and liquids (6100× no-slip Hagen-Poiseuille prediction). Achieved water permeances (>200 L m −2 h −1 bar −1) greatly exceed those of state-of-the-art commercial nano-and ultrafiltration membranes of similar pore size. Fabricated membranes reject nanometer-sized molecules, permit fractionation of dyes from concentrated salt solutions, and exhibit excellent chemical resistance. Altogether, these SWCNT membranes offer new opportunities for energy-efficient nano-and ultrafiltration processes in chemically demanding environments. Carbon nanotubes (CNTs) have garnered sustained interest in many areas of material science due to their outstanding thermal, mechanical, electrical, and fluidic properties and have enabled advancements in a variety of functional materials and technologies. [1,2] In separation applications, CNTs are interesting membrane building blocks as their unique transport properties lead to exceptionally large flow rates compared to conventional porous materials with commensurate pore sizes.

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“…There have been intensive studies on bi-metal catalyst nanoparticles, such as a Co-Mo catalyst [ 27 ], MgO supported FeCu catalyst [ 28 ], CoCu [ 29 ], and FeMo [ 30 ], which can produce small-diameter carbon nanotubes, including chirality controlled SWCNTs. However, it is still considered challenging to develop a method for the uniform formation of bi-metal catalysts over a large area via sputtering deposition.…”

Section: Introductionmentioning

confidence: 99%

Formation of Thermally Stable, High-Areal-Density, and Small-Diameter Catalyst Nanoparticles via Intermittent Sputtering Deposition for the High-Density Growth of Carbon Nanotubes

et al. 2022

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We report the formation of thermally stable catalyst nanoparticles via intermittent sputtering deposition to prevent the agglomeration of the nanoparticles during thermal chemical vapor deposition (CVD) and for the high-density growth of carbon nanotubes (CNTs). The preparation of high-areal-density and small-diameter catalyst nanoparticles on substrates for the high-density growth of CNTs is still a challenging issue because surface diffusion and Ostwald ripening of the nanoparticles induce agglomeration, which results in the low-density growth of large-diameter CNTs during high-temperature thermal CVD. Enhancing the adhesion of nanoparticles or suppressing their diffusion on the substrate to retain a small particle diameter is desirable for the preparation of thermally stable, high-areal-density, and small-diameter catalyst nanoparticles. The intermittent sputtering method was employed to deposit Ni and Fe metal nanoparticles on a substrate for the synthesis of high-areal-density CNTs for Fe nanoparticle catalyst films. The metal particles deposited via intermittent sputtering with an interval time of over 30 s maintained their areal densities and diameters during the thermal CVD process in a vacuum for CNT synthesis. An interval of over 30 s was expected to oxidize the metal particles, which resulted in thermal stability during the CVD process. The intermittent sputtering method is thus a candidate process for the preparation of thermally stable catalyst films for the growth of a high density of long CNTs, which can be combined with the present CNT production process.

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High-yield growth kinetics and spatial mapping of single-walled carbon nanotube forests at wafer scale

Cited by 15 publications

References 62 publications

Quality and Quantity of Carbon Nanotube Arrays Grown in Different Pressures and Temperatures Across Absorption-, Surface-, and Diffusion-Controlled Regimes

Quality and Quantity of Carbon Nanotube Arrays Grown in Different Pressures and Temperatures Across Absorption-, Surface-, and Diffusion-Controlled Regimes

Ultra‐Permeable Single‐Walled Carbon Nanotube Membranes with Exceptional Performance at Scale

Formation of Thermally Stable, High-Areal-Density, and Small-Diameter Catalyst Nanoparticles via Intermittent Sputtering Deposition for the High-Density Growth of Carbon Nanotubes

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