Highly-conducting indiumtin-oxide transparent films fabricated by spray CVD using ethanol solution of indium (III) chloride and tin (II) chloride

Sawada, Yutaka; Kobayashi, Chikako; Seki, Shigeyuki; Funakubo, Hiroshi

doi:10.1016/s0040-6090(02)00102-5

Cited by 95 publications

(57 citation statements)

References 15 publications

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“…ZnO nanostructures have many applications in solar cells, gas sensors, short-wavelength light-emitting and field effect devices, schottky diodes, coating materials etc. (Devoda et al 2007a) due to its excellent properties such as wide and direct band-gap of 3.3 eV and high exciton binding energy of 60 meV (Choopun et al 1999;Guo et al 2000;Li et al 2000;Sawada et al 2002).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of ZnO nanorods by simplified spray pyrolysis

Yılmaz¹,

Turgut²,

Aydın³

et al. 2015

Bitlis Eren University Journal of Science and Technology

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ZnO layers were deposited by a simple and cost-effective spray pyrolysis using zinc chloride aqueous solutions on glass substrates at 600 °C. The structural properties of nanorods were characterized by Xray diffraction (XRD), scanning electron microscopy (SEM). XRD studies showed that the films were at polycrystalline form and oriented along (002) direction preferentially and other observed orientations were (102), (103) and (004). The standard and the calculated lattice constants are in consistence. It was also observed that the deposited films were ZnO with hexagonal structure andsurfaces of the films are found to be nonhomogeneous with hexagonal shaped rods.

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Section: Introductionmentioning

confidence: 99%

Fabrication of ZnO nanorods by simplified spray pyrolysis

Yılmaz¹,

Turgut²,

Aydın³

et al. 2015

Bitlis Eren University Journal of Science and Technology

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“…Synthesis of ITO has been carried out by several methods, including RF magnetron sputtering 13 , electron 14 or ion beam evaporation 15 , pulsed laser ablation 16 , sol-gel process 17 and chemical vapor deposition (CVD) 18,19 . The relative simplicity and low-cost of ITO films synthesized by CVD have made this technique technologically advantageous.…”

Section: Introductionmentioning

confidence: 99%

Indium tin oxide synthesized by a low cost route as SEGFET pH sensor

et al. 2013

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Polycrystalline ITO films with good optoelectronics characteristics and homogeneous surface has been obtained upon annealing at 550 °C in N 2 atmosphere using a low-cost chemical vapor deposition (CVD) system. The films were evaluated as pH sensors in separative extended gate field-effect transistor (SEGFET) apparatus, exhibiting a sensitivity of 53 mV/pH, close to the expected Nernstian theoretical value for ion sensitive materials. The use of CVD process to synthesize ITO, as described here, may represent an alternative for fabrication of SEGFET pH sensors at low cost to be used in disposable biosensors since H + ions are the product of several oxireductase enzymes.

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“…The values carrier concentrations of ITO thin films fabricated by inkjet printing is lower than those by conventional method under vacuum condition. 8,9) In order to improve the carrier concentration, researches are being continued.…”

Section: Resultsmentioning

confidence: 99%

“…8,9) In order to improve those optical properties with the improvement of the electrical properties, studies are being continued with the investigation on other parameters.…”

Section: Resultsmentioning

confidence: 99%

Characteristics of Printed Thin Films Using Indium Tin Oxide (ITO) Ink

et al. 2010

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Characteristics of the indium tin oxide (ITO) thin films fabricated by a direct printing method were investigated. For the direct printing, 30 mass% ITO ink was formulated by dispersing ITO nanoparticles of less than 10 nm in diameter into alcohol based solvent with additives. Then, the ITO ink was printed onto a glass substrate, which was followed by the heat treatment at 350, 400, 500 and 600 C to fabricate the sintered films. Then, cross-section of sintered film was observed. As a result, the ITO thin film showed porous nanostructure. Also, sheet resistance of the ITO thin film decreased with increasing heating temperature. The decrease of the resistance was attributed to the improvement of carrier concentration in the ITO thin film. In the meanwhile, the optical transmittance increased in proportional to the heating temperature. In case of the ITO thin film heated at 600 C, the improved characteristics of the electrical resistance and the optical transmittance were achieved as 2:19 Â 10 3 /sq and 78.6%, respectively.

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Highly-conducting indiumtin-oxide transparent films fabricated by spray CVD using ethanol solution of indium (III) chloride and tin (II) chloride

Cited by 95 publications

References 15 publications

Fabrication of ZnO nanorods by simplified spray pyrolysis

Fabrication of ZnO nanorods by simplified spray pyrolysis

Indium tin oxide synthesized by a low cost route as SEGFET pH sensor

Characteristics of Printed Thin Films Using Indium Tin Oxide (ITO) Ink

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