“…In STO-based heterostructures, besides epitaxially grown crystalline overlayers, the 2DEG heterostructures with amorphous oxide overlayers have been well-investigated in recent years for their simple fabrication process and relatively high mobility. − Researchers demonstrated that metallic interfaces could be realized in SrTiO 3 -based heterostructures with various amorphous insulating overlayers, among which amorphous Al 2 O 3 (aAO) is relatively simple in composition. , As a result of the redox reaction, the formation of oxygen vacancies near the interface in the STO side gives rise to a metallic interface. ,− In light of the easy fabrication for potential electronic applications, the integration of 2DEG on a silicon wafer is more accessible in amorphous Al 2 O 3 /SrTiO 3 (aAO/STO) heterostructures.…”