2015
DOI: 10.1002/pip.2601
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Highly conductive ZnO films with high near infrared transparency

Abstract: We present an approach for deposition of highly conductive nominally undoped ZnO films that are suitable for the n-type window of low band gap solar cells. We demonstrate that the low-voltage radio frequency (RF) biasing of the growing ZnO films during their deposition by non-reactive sputtering makes them as conductive as when doped by aluminium (ρ ≤ 1 · 10 −3 Ω cm). The films prepared with additional RF biasing possess lower free carrier concentration and higher free carrier mobility than the Al-doped ZnO (A… Show more

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Cited by 22 publications
(18 citation statements)
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“…1(a) it can be seen that an occasional drop in b-ZnO film resistivity that further lowers the corresponding ∆ρ is observed. The reason for this unexpected behaviour is not yet understood, as the previously assumed correlation with the season of the year [1] was not confirmed. However, one can speculate that the actual air humidity during the resistivity analyses may be of importance since the drop in ∆ρ is higher for thinner or more degraded samples that can exhibit a rougher surface; this effect is also witnessed by the pronounced drop in ρ of the ZnO 520 nm film after 22 months of anneling, as visible in Fig.…”
Section: A Ambient Air Ageingmentioning
confidence: 82%
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“…1(a) it can be seen that an occasional drop in b-ZnO film resistivity that further lowers the corresponding ∆ρ is observed. The reason for this unexpected behaviour is not yet understood, as the previously assumed correlation with the season of the year [1] was not confirmed. However, one can speculate that the actual air humidity during the resistivity analyses may be of importance since the drop in ∆ρ is higher for thinner or more degraded samples that can exhibit a rougher surface; this effect is also witnessed by the pronounced drop in ρ of the ZnO 520 nm film after 22 months of anneling, as visible in Fig.…”
Section: A Ambient Air Ageingmentioning
confidence: 82%
“…In consequence, their transparency in near infrared (NIR) spectral region is significantly improved. Furthermore, a replacement of AZO by b-ZnO as an n-doped window of various chalcopyrite and kesterites thin film solar cells was shown to enhance short-circuit current [1].…”
Section: Introductionmentioning
confidence: 99%
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“…The biased zinc oxide is a highly conductive nominally undoped ZnO, obtained by means of an additional plasma near the substrate during sputter deposition and is characterized by its high infrared transparency, which makes it particularly useful for low bandgap cells. Details can be found in . Magnesium fluoride (MgF 2 ) antireflection coating (ARC) layer was deposited at the top of the 3 cells using the same electron beam deposition tool.…”
Section: Methodsmentioning
confidence: 99%
“…Such analysis assumes a relation between the optical absorption coefficient (α) and the photon energy which is α 2 ∝ ( E–E g ) for direct band gap and α ∝ ( E–E g ) 2 for indirect band gap materials . The parameter α is calculated from film thickness, t , transmittance, T , and reflectance, R , byα=(1t)ln(T1R).…”
Section: Resultsmentioning
confidence: 99%