Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

Abstract

A highly effective and versatile test structure with a flexible pulse generating circuit is proposed. Several significant features of the key components are demonstrated, that is, the tunable ring oscillator, the start-stop pulse controller, the Charge Injection induced Error Free Charge Based Capacitance Measurement (CIEF-CBCM) using Self-Aligned pulses and the modified Charge Pumping (CP) technique. This circuit system enables efficiently to collect data of multiple dielectric properties.