“…In contrast, the vertical LEDs (VLEDs), which enable the wafer bonding of the p-type GaN on substrates such as silicon, silicon carbides, metals, and metal alloys for removing the sapphire substrate, have many advantages of better current injection without current crowding, excellent thermal dissipation, high light extraction, and good reliability [8][9][10][11][12]. For VLEDs, a laser lift-off (LLO) process has been often used to remove the sapphire substrate from the GaN epitaxial layer.…”