Highly Efficient Passive Thermal Micro-Actuator

Steiner, Harald; Keplinger, Franz; Schalko, J.; Hortschitz, Wilfried; Stifter, Matthias

doi:10.1109/jmems.2015.2457094

Cited by 19 publications

(12 citation statements)

References 31 publications

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“…The advantages of MEMS switches can be achieved due to the mechanical actuation which is physically opened or closed the circuit. There are four basic actuation principles, electrostatic actuation [94][95][96][97][98], electromagnetic actuation [99,100], piezoelectric actuation [101][102][103][104], and electrothermal actuation [105,106]. Four typical principles of MEMS switches include the electrostatic principle, electromagnetic principle, piezoelectric principle, thermoelectric principle.…”

Section: Mems Switchmentioning

confidence: 99%

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Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Section: Mems Switchmentioning

confidence: 99%

“…piezoelectric actuation [101][102][103][104], and electrothermal actuation [105,106]. Four typical principles of MEMS switches include the electrostatic principle, electromagnetic principle, piezoelectric principle, thermoelectric principle.…”

Section: Mems Switchmentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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“…In addition to the indirect effect on mechanical analysis through temperature errors, ignorance of interactions among parallel V-beams may also directly decrease the mechanical parameter accuracy of existing models. Almost all existing research studies adopt rigid-shuttle assumption, 17,27 which ignores the thermal expansion and elastic deformation of the shuttle beams. Under this assumption, the extension of the shuttle beam is neglected and the displacements of every horizontal beam's joint with the shuttle are equal (Figure 2(A)).…”

Section: Existing Models and Its Limitationsmentioning

confidence: 99%

An efficient electro‐thermo‐mechanical model for the analysis of V‐shaped thermal actuator connected with driven structures

Zhao

Zhou

Meng

et al. 2020

Int J Numerical Modelling

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V-shaped thermal actuators are popular in many types of microelectromechanical systems' (MEMS) devices. In the rapidly growing applications of V-shaped thermal actuators, there are usually complex driven structures, in which the Joule heat may transfer, connecting to the V-beams. However, their influence on the temperature distribution has not been included in existing analytical models. An electro-thermo-mechanical model is presented to tackle this problem. By dividing the thermal actuator into a set of short beams, a two-dimensional network is constructed. Besides, the driven structure can be analyzed as an equivalent circuit of thermal resistances. Then, circuit-like node equations can be acquired for this heat flow network to solve the heat distribution. On this basis, the heat expansions of the shuttle beam are taken into consideration to predict the displacements and forces under different driving voltage and ambient temperature. Taking a test structure as an example, this model is proved to be accurate by comparing the results with finite element analysis. This model can be served as an effective analysis technique for MEMS devices containing V-shaped thermal actuators.

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“…(2016) designed an electrothermal gripper, and the displacement of the micro-gripper is observed to be 311 μm for an applied current of 0.26 A with maximum power dissipation of 0.4 W. Nakic et al (2016) designed a platform actuated by electrothermal actuators which allows a positioning accuracy of less than 5 μm. Steiner et al . (2015) presents a completely passive thermal actuator which exhibits an efficient conversion of the thermally induced elastic energy into mechanical work.…”

Section: The Actuators Of Robotic Manipulatorsmentioning

confidence: 99%

How to achieve precise operation of a robotic manipulator on a macro to micro/nano scale

Shi

Wang

et al. 2017

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Purpose The purpose of this paper is to present state-of-the-art approaches for precise operation of a robotic manipulator on a macro- to micro/nanoscale. Design/methodology/approach This paper first briefly discussed fundamental issues associated with precise operation of a robotic manipulator on a macro- to micro/nanoscale. Second, this paper described and compared the characteristics of basic components (i.e. mechanical parts, actuators, sensors and control algorithm) of the robotic manipulator. Specifically, commonly used mechanisms of the manipulator were classified and analyzed. In addition, intuitive meaning and applications of its actuator explained and compared in details. Moreover, related research studies on general control algorithm and visual control that are used in a robotic manipulator to achieve precise operation have also been discussed. Findings Remarkable achievements in dexterous mechanical design, excellent actuators, accurate perception, optimized control algorithms, etc., have been made in precise operations of a robotic manipulator. Precise operation is critical for dealing with objects which need to be manufactured, modified and assembled. The operational accuracy is directly affected by the performance of mechanical design, actuators, sensors and control algorithms. Therefore, this paper provides a categorization showing the fundamental concepts and applications of these characteristics. Originality/value This paper presents a categorization of the mechanical design, actuators, sensors and control algorithms of robotic manipulators in the macro- to micro/nanofield for precise operation.

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Highly Efficient Passive Thermal Micro-Actuator

Cited by 19 publications

References 31 publications

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

An efficient electro‐thermo‐mechanical model for the analysis of V‐shaped thermal actuator connected with driven structures

How to achieve precise operation of a robotic manipulator on a macro to micro/nano scale

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