in which the battery materials for the anode, cathode, and solid electrolyte are formed and defined spatially through lithography. The synthesis of metal oxide thin-film structures using photosensitive metallorganics is well known in the fields of optical waveguides, electronics, and sensors among others. [8][9][10] Titanium dioxide, a negative electrode for lithiumion batteries, has been synthesized via photopatterning with resolution down to 10 nm. [8] Furthermore, ternary and quaternary oxides have been demonstrated, suggesting that cathode materials such as lithium cobalt oxide may be attainable. [9,10] Research related to photopatternable solid electrolytes has largely focused on polymers that can be cross-linked in the presence of UV radiation. [11][12][13][14] However, these studies have not demonstrated the ability to pattern solid electrolytes directly on electrodes.SU-8 is an epoxy-based negative photoresist that is used in the fields of semiconductors, microfluidics, and MEMS due to its spatial resolution at the sub-30 nm level and ability to pattern high aspect-ratio structures. [15,16] In this study, we demonstrate that SU-8 can be modified to become a gel electrolyte. Modification of SU-8 with a lithium salt improves ionic conductivity without sacrificing patternability. SU-8 as a gel electrolyte demon strates a high ionic conductivity at room temperature along with good electrochemical stability, mechanical rigidity, and the ability to photopattern with micrometer-scale resolution.Initial studies of SU-8 focused on the effect of adding a lithium perchlorate salt (LiClO 4 ) to the crosslinked structure of SU-8 photoresist. During UV exposure, the eight epoxide groups in the SU-8 monomer were opened by acid generated by the photoinitiator ( Figure S1, Supporting Information). These groups then form ether linkages with neighboring end groups and crosslinking continues at elevated temperatures during the postexposure and hard bake. The fabrication of SU-8 and mSU-8 samples is depicted in Scheme S1 (Supporting Information). Fourier-transform infrared (FTIR) spectroscopy was used to quantitatively evaluate this process and to elucidate the structure of SU-8 polymer after the incorporation of LiClO 4 . Figure 1a shows the FTIR spectrum of the SU-8 films with different degrees of crosslinking and that of the mSU-8 film. Spectra are normalized to the benzene ring peak at 1608 cm â1 , which does not go through any chemical changes during the crosslinking process. The three characteristic absorption peaks One of the important considerations for the development of on-chip batteries is the need to photopattern the solid electrolyte directly on electrodes. Herein, the photopatterning of a lithium-ion conducting solid electrolyte is demonstrated by modifying a well-known negative photoresist, SU-8, with LiClO 4 . The resulting material exhibits a room temperature ionic conductivity of 52 ”S cm â1 with a wide electrochemical window (>5 V). Half-cell galvanostatic testing of 3 ”m thin films spin-coated on amorphou...