Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays

Kim, Min Ook; Lee, Kyounghoon; Na, Hyungjoo; Kwon, Daeho; Choi, Jungwook; Lee, Jae Ik; Baek, Dae Hyun; Kim, Jongbaeg

doi:10.1016/j.snb.2014.03.019

Cited by 8 publications

(6 citation statements)

References 38 publications

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“…With very high stiffness, high thermal conductivity, optical transparency range, chemical stability and wear resistance for the diamond-based materials extend their applicability for MEMS/NEMS [24]. Besides, these diamond materials which are nevertheless presenting a large panel of different structures and properties, and which have to be distinguished from each other’s [3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20,21,22,23,24,25,26,27,28,29,30,31,32,33,34,35,36,37,38,39,40,41,42,43,44,45,46,47,48,49,50,51,52,53,54,55,56,57,58,59,60,…”

Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

“…Although, micro, nano electromechanical and optomechanical systems are still often confronted to the lack of quality and longer life time and to the search of extended higher performances [1], huge progress has been recently achieved in MEMS and NEMS technology in using more performing carbon-based materials, which are presenting a large panel of various superior properties concerning their mechanical properties, such as young modulus, Poisson’s ratio, fracture strength of nanocrystalline diamond for instance [2], tribological, electric, semicon, piezoelectric, heat conducting and optical/optoelectrical properties [3,4], diamond micro and nano resonators [5,6], piezo-resistivity obtained with carbon nanotubes [7], diamond-like carbon MEMS sensors [8] and many more which are making use of functionalized graphenic and related materials [9,10,11,12,13,14,15,16,17,18,19,20].…”

Section: Introductionmentioning

confidence: 99%

“…Key hurdles currently preventing the commercial application of many NEMS devices include low-yields and high device quality variability, concerning structure, physical and chemical stability, nucleation, adhesion, different kinds of internal and interface stress, tribology and wear rates, contamination diffusion barrier properties, stability and reproducibility of surface functionalization [16,17,18,19]. Before NEMS devices can actually be industrially implemented, reasonable integrations of carbon-based products must be created [21].…”

Section: Introductionmentioning

confidence: 99%

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Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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The development of micro and nano electromechanical systems and achievement of higher performances with increased quality and life time is confronted to searching and mastering of material with superior properties and quality. Those can affect many aspects of the MEMS, NEMS and MOMS design including geometric tolerances and reproducibility of many specific solid-state structures and properties. Among those: Mechanical, adhesion, thermal and chemical stability, electrical and heat conductance, optical, optoelectronic and semiconducting properties, porosity, bulk and surface properties. They can be affected by different kinds of phase transformations and degrading, which greatly depends on the conditions of use and the way the materials have been selected, elaborated, modified and assembled. Distribution of these properties cover several orders of magnitude and depend on the design, actually achieved structure, type and number of defects. It is then essential to be well aware about all these, and to distinguish and characterize all features that are able to affect the results. For this achievement, we point out and discuss the necessity to take into account several recently revisited fundamentals on carbon atomic rearrangement and revised carbon Raman spectroscopy characterizing in addition to several other aspects we will briefly describe. Correctly selected and implemented, these carbon materials can then open new routes for many new and more performing microsystems including improved energy generation, storage and conversion, 2D superconductivity, light switches, light pipes and quantum devices and with new improved sensor and mechanical functions and biomedical applications.

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Section: Increased Nems Performances With Advanced Carbon Materialsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Selective Carbon Material Engineering for Improved MEMS and NEMS

Neuville¹

2019

Micromachines

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“…Several categories of nanomaterials can react with H 2 and produce sensing signals, such as electrochemical, (18) chemoresistive, (19,20) optical, (21,22) mechanical, (23) and other signals, (24,25) which can be used to develop hydrogen sensors. Therefore, there have been numerous studies on hydrogen sensors.…”

Section: Introductionmentioning

confidence: 99%

Gasochromic Hydrogen Sensors: Fundamentals, Recent Advances, and Perspectives

Liu¹,

Yang²,

Wang³

et al. 2023

Sensors and Materials

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Hydrogen (H 2 ) is recognized as a vital solution for constructing a sustainable energy society owing to its abundance, high efficiency, and lack of pollution. However, H 2 is the lightest gas on earth and can embrittle metals, leading to hydrogen leakage. Because hydrogen has a wide flammability range of 4-74 vol.% in air and low ignition energy, it is crucial to identify hydrogen leakages quickly and efficiently to ensure safety. Although various hydrogen sensors have been developed, gasochromic hydrogen sensors, which are based on color changes caused by gasochromic nanomaterials, show great potential for use in the future hydrogen-based world because they are inexpensive, change color very quickly, and work at room temperature. This technical paper focuses on gasochromic hydrogen sensors. First, gasochromic mechanisms based on WO 3 nanomaterials are introduced, and three aspects of state-of-the-art research, WO 3 nanomaterials with novel structures, noble metals to promote reactions, and flexible fabrication, are presented. Research on the former two aspects aims to develop high-performance gasochromic nanomaterials, and research on flexible fabrication, i.e., transforming nanomaterials into potential hydrogen sensors, is reviewed here for the first time. In addition, other non-WO 3based gasochromic systems are briefly reviewed. Finally, this technical paper provides a brief perspective for future research.

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“…In order to further improve the safety of hydrogen in production, transportation, usage, and other scenarios, it is particularly important to develop a fast-response hydrogen sensor for early warning of hydrogen leakage. Various types of H2 sensors have been developed, such as electrochemical, electric resistance, mechanical, optical, and acoustic sensing principles [3][4][5][6][7]. Optical fiber has many excellent features, such as immunity to electromagnetic interference, corrosion resistance, and long-distance signal transmission.…”

Section: Introductionmentioning

confidence: 99%

Fast Response and Highly Repeatable Hydrogen Measurement via Pd/WO3 Film Coated Optical Fiber Sensors and Spectral Comb Interrogation

Zhang¹,

Yan²,

Li³

et al. 2023

Preprint

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Hydrogen, a high-density and clean energy, have been widely used in various critical applications. However, the safety risk caused by hydrogen leakage during storage and transportation is still a non-negligible issue. Therefore, it is necessary to offer hydrogen sensors with fast response and high repeatability, and it will be perfect for achieving in situ monitoring over the lifecycle of hydrogen production and utilization. Here we proposed a compact optical fiber sensor with a short section of tilted Bragg fiber grating (TFBG) inscribed in the fiber core and coating the fiber surface with a 40 nm thickness of palladium and tungsten trioxide (Pd/WO3) combined film. The TFBG excites tens of narrow cladding resonances, part of which possess refractive indexes matching that of the Pd/WO3 coating and provides a high sensitivity to the surrounding hydrogen concentration change. The sensor offers improved sensing characteristics, including a fast response time (less than 10 seconds), high repeatability (over tens of measurements), an excellent linear response (higher than 99.6%) over the 0 to 3% concentration range, with a detection limit of approximately 2417 ppm.

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Highly sensitive cantilever type chemo-mechanical hydrogen sensor based on contact resistance of self-adjusted carbon nanotube arrays

Cited by 8 publications

References 38 publications

Selective Carbon Material Engineering for Improved MEMS and NEMS

Selective Carbon Material Engineering for Improved MEMS and NEMS

Gasochromic Hydrogen Sensors: Fundamentals, Recent Advances, and Perspectives

Fast Response and Highly Repeatable Hydrogen Measurement via Pd/WO3 Film Coated Optical Fiber Sensors and Spectral Comb Interrogation

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