A novel low-temperature SnO 2 gas sensor was prepared and studied on silicon nanostructures formed by femtosecond laser irradiation. By applying a bias voltage on the silicon substrate to alter the charge distribution on the surface of the SnO 2 , carbon monoxide (CO), and ammonia (NH 3 ) gas can be distinguished by the same sensor at room temperature. The experimental results are explained with a mechanism that the sensor works at low temperature because of adsorption of gas molecules that trap electrons to the surface of the SnO 2 .