Highly sensitive mass sensor using film bulk acoustic resonator

Lin, Re-Ching; Chen, Ying–Chung; Chang, Wei‐Der; Cheng, Chien‐Chuan; Kao, K. C.

doi:10.1016/j.sna.2008.05.011

Cited by 61 publications

(29 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…(23) Therefore, various top electrode materials and different thicknesses were investigated using the Mason model. First, Pt, W, Ag, Mo, and Al were adopted as the top electrodes of the SMR device for examining the influence of resonant frequency.…”

Section: Various Top Electrode Materials and Thicknessesmentioning

confidence: 99%

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

2017

Sensors and Materials

View full text Add to dashboard Cite

Acoustic wave devices are divided into two categories: surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices. To provide modification parameters during manufacturing, advanced modeling, simulation, and other computational methods is crucial for maintaining a competitive edge through efficient product design. In this study, an equivalent circuit modification based on the Mason model is used for obtaining the actual device measurements. The effects of various film conditions, material properties, and geometrical variations on resonator performance are investigated. Furthermore, the performance of a filter comprising various stages of series and parallel resonators is examined.

show abstract

Section: Various Top Electrode Materials and Thicknessesmentioning

confidence: 99%

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

2017

Sensors and Materials

View full text Add to dashboard Cite

show abstract

“…Fig. 9 illustrates the setup of the post-layout simulation where a butterworth filter replaces an FBAR sensor [10]- [11]. The reason why the sensor is replaced by a butterworth filter is that the frequency response of the FBAR sensor is a band-reject filter, which can be approximated with an RLC-based filter.…”

Section: Implementation and Simulationmentioning

confidence: 99%

A 20 GHz power detector with 176 mV/dB conversion gain

Wangt

Wang

Chen

et al. 2014

2014 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS)

View full text Add to dashboard Cite

This paper introduces a high frequency power detector with high conversion gain for frequency-shift applications. The proposed design comprises an amplitude-to-voltage convertor (AVC), a peak detector, and a bandgap. To increase the operating frequency range, AVC utilizes the half of an RMS power detector to attain the power measure of an input signal. Since the input power is converted to a DC voltage by AVC, the peak detector will secure the resonant frequency when AVC generates the highest voltage. The proposed power detector circuit is realized on silicon using a 60 V 0.25 μm CMOS technology. The post-layout simulation result shows that the proposed circuit is able to detect input frequency from 500 Hz to 20 GHz, and the conversion gain of AVC is 176 mV/dB, while the power consumption is 20 mW given a 5 V power supply voltage.

show abstract

“…FBARs have also been utilized as sensors with high-sensitivity for various applications such as humidity, UV and biosensors [1][2][3]. There are three types of FBAR device structures, namely the back-trench, air-bag and Bragg reflector.…”

Section: Introductionmentioning

confidence: 99%

Novel flexible FBAR on PET substrate

Bian

et al. 2014

2014 IEEE International Conference on Electron Devices and Solid-State Circuits

View full text Add to dashboard Cite

A novel flexible Film Bulk Acoustic Wave Resonators (FBARs) based on ZnO/PET structure was fabricated without back-etch. The PET layer is applied as acoustic reflector and substrate of FBAR. It has 1.14GHz parallel resonant frequency, 1.229GHz series resonant frequency and about 150 Q factors. The FBARs acoustic impedance is improved by using harden metal Au instead of AI as the bottom electrodes. TheZnO/PET structure FBAR is also simulated by COSMOL to confirm its working mechanism.

show abstract

Highly sensitive mass sensor using film bulk acoustic resonator

Cited by 61 publications

References 10 publications

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

Simulation of Solidly Mounted Resonator Using Mason Model and Its Implementation

A 20 GHz power detector with 176 mV/dB conversion gain

Novel flexible FBAR on PET substrate

Contact Info

Product

Resources

About