By use of optical spectrum technology, the spectra of X-ray induced by highly charged 40 Ar q+ ions interacting with Au surface have been studied. The results show that the argon Kα X-ray were emitted from the hollow atoms formed below the surface. There is a process of multi-electron exciting in neutralization of the Ar 16+ ion, with electronic configuration 1s 2 in its ground state below the solid surface. The yield of the projectile Kα X-ray is related to its initial electronic configuration, and the yield of the target X-ray is related to the projectile kinetic energy.Keywords: highly charged ion, hollow, multi-electron excitation, X-ray.When a highly charged ion with many inner shell holes, provided by the electron cyclotron resonance (ECR) ion source, is approaching to a metallic surface, the conducting-band electrons in the metal can resonantly transfer into the high orbits of the projectile with the principal quantum number / n q W ≈ (q is the charge state of the projectile and W the work function of the metal). As the distance of the projectile to the surface is smaller than a critical value of c 2 / , R q W ≈ the potential barrier between the ion and the surface will drop below the Fermi level. In this way, the ion could be temporarily neutralized to form a hollow atom with outer shell occupied and inner shells empty. For example, when Ar 18+ impacts on the Au surface, the hollow argon atom could be formed at R c =33 a.u. with n=20, and when U 92+ impacts on the Au surface, the hollow uranium